Active opening force and passive contact force electrostatic switches for soft metal contact materialsOBERHAMMER, Joachim; STEMME, Göran.Journal of microelectromechanical systems. 2006, Vol 15, Num 5, pp 1235-1242, issn 1057-7157, 8 p.Article

Three-dimensional micromachined silicon-substrate integrated millimetre-wave helical antennasSOMJIT, Nutapong; OBERHAMMER, Joachim.IET microwaves, antennas & propagation (Print). 2013, Vol 7, Num 4, pp 291-298, issn 1751-8725, 8 p.Article

Symmetrical Antidirectional Metallization for Stress Compensation of Transfer-Bonded Monocrystalline Silicon MembranesSTERNER, Mikael; OBERHAMMER, Joachim.Journal of microelectromechanical systems. 2013, Vol 22, Num 1, pp 195-205, issn 1057-7157, 11 p.Article

High-Directivity MEMS-Tunable Directional Couplers for 10―18-GHz Broadband ApplicationsSHAH, Umer; STERNER, Mikael; OBERHAMMER, Joachim et al.IEEE transactions on microwave theory and techniques. 2013, Vol 61, Num 9, pp 3236-3246, issn 0018-9480, 11 p.Article

Integration of microwave MEMS devices into rectangular waveguide with conductive polymer interposersBAGHCHEHSARAEI, Zargham; STERNER, Mikael; ÅBERG, Jan et al.Journal of micromechanics and microengineering (Print). 2013, Vol 23, Num 12, issn 0960-1317, 125020.1-125020.10Article

Parameter Analysis of Millimeter-Wave Waveguide Switch Based on a MEMS-Reconfigurable SurfaceBAGHCHEHSARAEI, Zargham; OBERHAMMER, Joachim.IEEE transactions on microwave theory and techniques. 2013, Vol 61, Num 12, pp 4396-4406, issn 0018-9480, 11 p., 2Article

Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and DevicesSTERNER, Mikael; ROXHED, Niclas; STEMME, Göran et al.Journal of microelectromechanical systems. 2011, Vol 20, Num 4, pp 899-908, issn 1057-7157, 10 p.Article

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated DiaphragmFEIXIANG KE; JIANMIN MIAO; OBERHAMMER, Joachim et al.Journal of microelectromechanical systems. 2008, Vol 17, Num 6, pp 1447-1459, issn 1057-7157, 13 p.Article

Contact printing for improved bond-strength of patterned adhesive full-wafer bonded 0-level packagesOBERHAMMER, Joachim; STEMME, Goran.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 713-716, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Power Handling Analysis of High-Power W-Band All-Silicon MEMS Phase ShiftersSOMJIT, Nutapong; STEMME, Göran; OBERHAMMER, Joachim et al.I.E.E.E. transactions on electron devices. 2011, Vol 58, Num 5, pp 1548-1555, issn 0018-9383, 8 p.Article

Deep-Reactive-Ion-Etched Wafer-Scale-Transferred All-Silicon Dielectric-Block Millimeter-Wave MEMS Phase ShiftersSOMJIT, Nutapong; STEMME, Göran; OBERHAMMER, Joachim et al.Journal of microelectromechanical systems. 2010, Vol 19, Num 1, pp 120-128, issn 1057-7157, 9 p.Article

Row/Column Addressing Scheme for Large Electrostatic Actuator MEMS Switch Arrays and Optimization of the Operational Reliability by Statistical AnalysisBRAUN, Stefan; OBERHAMMER, Joachim; STEMME, Goran et al.Journal of microelectromechanical systems. 2008, Vol 17, Num 5, pp 1104-1113, issn 1057-7157, 10 p.Article

Time-efficient quasi-static algorithm for simulation of complex single-sided clamped electrostatic actuatorsOBERHAMMER, Joachim; LIU, A.-Q; STEMME, Göran et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 2, pp 373-382, issn 1057-7157, 10 p.Article

Multi-Position RF MEMS Tunable Capacitors Using Laterally Moving Sidewalls of 3-D Micromachined Transmission LinesSHAH, Umer; STERNER, Mikael; OBERHAMMER, Joachim et al.IEEE transactions on microwave theory and techniques. 2013, Vol 61, Num 6, pp 2340-2352, issn 0018-9480, 13 p.Article

Binary-Coded 4.25-bit W-Band Monocrystalline―Silicon MEMS Multistage Dielectric-Block Phase ShiftersSOMJIT, Nutapong; STEMME, Göran; OBERHAMMER, Joachim et al.IEEE transactions on microwave theory and techniques. 2009, Vol 57, Num 11, pp 2834-2840, issn 0018-9480, 7 p.Article

S-shaped film actuator for low-voltage high-isolation MEMS metal contact switchesOBERHAMMER, Joachim; STEMME, Goran.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 637-640, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Waveguide-integrated MEMS-based phase shifter for phased array antennaBAGHCHEHSARAEI, Zargham; VOROBYOV, Alexander; AERG, Jan et al.IET microwaves, antennas & propagation (Print). 2014, Vol 8, Num 4, pp 235-243, issn 1751-8725, 9 p.Article