Micromachining technology for micro-optics and nano-optics V and Microfabrication process technology XII (22-24 January 2007, San Jose, California, USA)Perez-Maher, Mary Ann.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6575-7, 1Vol, various pagings, isbn 978-0-8194-6575-7Conference Proceedings

Grinding aspheric and freeform micro-optical moldsTOHME, Yazid E.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64620K.1-64620K.8, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Polarization engineering through nanoengineered morphologyLAKHTAKIA, Akhlesh.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64620Q.1-64620Q.6, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Micromachining and microfabrication process technology XIV (27 January 2009, San Jose, California, United States)Perez-Maher, Mary Ann; Chiao, Jung-Chih; Resnick, Paul J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7204, issn 0277-786X, isbn 978-0-8194-7450-6 0-8194-7450-9, 1Vol, various pagings, isbn 978-0-8194-7450-6 0-8194-7450-9Conference Proceedings

Processing parameters for the development of glass/ceramic MEMSSTILLMAN, J; JUDY, J; HELVAJIAN, H et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64620A.1-64620A.13, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Microfabricated 3-D polymeric structure with SU-8SHIN WOOK YI; HONG JIN KONG.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 646206.1-646206.10, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Combined nano-imprint and photolithography (CNP) of integrated polymer opticsCHRISTIANSEN, Mads Brøkner; SCHØLER, Mikkel; KRISTENSEN, Anders et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64620O.1-64620O.9, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Alternative method for steam generation for thermal oxidation of siliconSPIEGELMAN, Jeffrey J.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7590, issn 0277-786X, isbn 978-0-8194-7986-0 0-8194-7986-1, 1Vol, 75900L.1-75900L.10Conference Paper

Diffractive optical elements fabricated by precise pressing of glassVOGT, Helge; WÖLFING, Bernd; PAWLOWSKI, Edgar et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64621E.1-64621E.10, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Setting new standards in memsRIMSKOG, Magnus; O'LOUGHLIN, Brian J.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 646208.1-646208.8, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Micromachining and microfabrication process technology XVI (25 and 27 January 2011, San Francisco, California, United States)Perez-Maher, Mary Ann; Chiao, Jung-Chih; Resnick, Paul J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7926, issn 0277-786X, isbn 978-0-8194-8463-5, 1Vol, various pagings, isbn 978-0-8194-8463-5Conference Proceedings

Micromachining and microfabrication process technology XV (26 January 2010, San Francisco, California, United States)Perez-Maher, Mary Ann; Chiao, Jung-Chih; Resnick, Paul J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7590, issn 0277-786X, isbn 978-0-8194-7986-0 0-8194-7986-1, 1Vol, various pagings, isbn 978-0-8194-7986-0 0-8194-7986-1Conference Proceedings

Implementation of far-field phase-shift lithography using diffractive optical elementsHSU, Wei-Feng; SU, Yuan-Hong.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64621C.1-64621C.8, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Micromachining and microfabrication process technology XIII (22-23 January 2008, San Jose, California, USA)Perez-Maher, Mary Ann; Chiao, Jung-Chih; Resnick, Paul J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, issn 0277-786X, isbn 978-0-8194-7057-7, 1 v. (various pagings), isbn 978-0-8194-7057-7Conference Proceedings

New emerging MEMS applicationsMOUNIER, Eric; ELOY, Jean-Christophe.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64620C.1-64620C.7, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Three-dimensional diffractive micro-and nano-optical elements fabricated by electron-beam lithographyDIVLIANSKY, Ivan B; JOHNSON, Eric G.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64621B.1-64621B.8, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Diamond turning of aspheric steel molds for optics replicationKLOCKE, F; DAMBON, O; BULLA, B et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7590, issn 0277-786X, isbn 978-0-8194-7986-0 0-8194-7986-1, 1Vol, 75900B.1-75900B.10Conference Paper

Estimation of tool wear compensation during micro-electro-discharge machining of silicon using process simulationMURALIDHARA; VASA, N. J; SINGAPERUMAL, M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7590, issn 0277-786X, isbn 978-0-8194-7986-0 0-8194-7986-1, 1Vol, 75900K.1-75900K.9Conference Paper

Cost-effective method of manufacturing a 3D MEMS optical switchCARR, Emily; PING ZHANG; KEEBAUGH, Doug et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7204, issn 0277-786X, isbn 978-0-8194-7450-6 0-8194-7450-9, 1Vol, 720402.1-720402.8Conference Paper

MEMS Reliability : Coming of AgeDOUGLASS, Michael R.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 688402.1-688402.8, issn 0277-786X, isbn 978-0-8194-7057-7Conference Paper

Pulsed laser ablation for volume micro-optical arrays on large area substratesPEDDER, J. E. A; HOLMES, A. S; ALLOTT, Ric et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64620W.1-64620W.7, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Silvered three-dimensional polymeric photonic crystals having a large mid-infrared stop bandKUEBLER, Stephen M; TAL, Amir; CHEN, Yun-Sheng et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 646213.1-646213.8, issn 0277-786X, isbn 978-0-8194-6575-7, 1VolConference Paper

Advances in photonic MOEMS-MEMS device thinning and polishingMCANENY, James J; KENNEDY, Mark; MCGROGGAN, Tom et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7590, issn 0277-786X, isbn 978-0-8194-7986-0 0-8194-7986-1, 1Vol, 75900G.1-75900G.11Conference Paper

Fabrication of plastic microlens arrays for array microscopy by diamond milling techniquesMCCALL, Brian; BIRCH, Gabriel; DESCOUR, Michael et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7590, issn 0277-786X, isbn 978-0-8194-7986-0 0-8194-7986-1, 1Vol, 75900A.1-75900A.10Conference Paper

Pulsed laser breaking technique for glass substratesTSAI, Chwan-Huei; CHANG, Wei-Han.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7204, issn 0277-786X, isbn 978-0-8194-7450-6 0-8194-7450-9, 1Vol, 72040A.1-72040A.9Conference Paper