Improvements of plasma immersion ion implantation (PIII) and deposition (PIII&D) processing for materials surface modificationUEDA, M; OLIVEIRA, R. M; ROSSI, J. O et al.Surface & coatings technology. 2013, Vol 229, pp 97-104, issn 0257-8972, 8 p.Conference Paper

A new high-temperature plasma immersion ion implantation system with electron heatingOLIVEIRA, R. M; GONCALVES, J. A. N; UEDA, M et al.Surface & coatings technology. 2010, Vol 204, Num 18-19, pp 3009-3012, issn 0257-8972, 4 p.Conference Paper

Secondary electron suppression in nitrogen plasma ion implantation using a low DC magnetic fieldUEDA, M; TAN, I. H; DALLAQUA, R. S et al.Surface & coatings technology. 2007, Vol 201, Num 15, pp 6597-6600, issn 0257-8972, 4 p.Conference Paper

Surface improvements of industrial components treated by plasma immersion ion implantation (pIII): results and prospectsUEDA, M; BERNI, L. A; CASTRO, R. M et al.Surface & coatings technology. 2002, Vol 156, Num 1-3, pp 71-76, issn 0257-8972Conference Paper

Plasma immersion ion implantation experiments with long and short rise time pulses using high voltage hard tube pulserROSSI, J. O; UEDA, M; BARROSO, J. J et al.Surface & coatings technology. 2001, Vol 136, Num 1-3, pp 43-46, issn 0257-8972Conference Paper

Nitrogen plasma ion implantation in silicon using short pulse high voltage glow dischargesTAN, I. H; UEDA, M; ROSSI, J. O et al.Journal of physics. D, Applied physics (Print). 2007, Vol 40, Num 17, pp 5196-5201, issn 0022-3727, 6 p.Article

Treatment of polymers by plasma immersion ion implantation for space applicationsTAN, I. H; UEDA, M; DALLAQUA, R. S et al.Surface & coatings technology. 2004, Vol 186, Num 1-2, pp 234-238, issn 0257-8972, 5 p.Conference Paper

Magnesium plasma immersion ion implantation on silicon wafersTAN, I. H; UEDA, M; DALLAQUA, R. S et al.Surface & coatings technology. 2003, Vol 169-70, pp 379-383, issn 0257-8972, 5 p.Conference Paper

Plasma immersion ion implantation experiments at the Instituto Nacional de Pesquisas Espaciais (INPE), BrazilUEDA, M; BERNI, L. A; ROSSI, J. O et al.Surface & coatings technology. 2001, Vol 136, Num 1-3, pp 28-31, issn 0257-8972Conference Paper