au.\*:("WAGHMARE, P. C")
Results 1 to 1 of 1
Selection :
Reliability issues of ultra thin silicon nitride (a-SiN:H) by hot wire CVD for deep sub-micron CMOS technologiesWAGHMARE, P. C; PATIL, S. B; KUMBHAR, A et al.SPIE proceedings series. 2002, pp 1418-1420, isbn 0-8194-4500-2, 2VolConference Paper