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Chemical mechanical polishing of cubic silicon carbide films grown on Si(100) wafersFU, Xiao-An; ZORMAN, Christian A; MEHREGANY, Mehran et al.Journal of the Electrochemical Society. 2002, Vol 149, Num 12, pp G643-G647, issn 0013-4651Article

Surface roughness control of 3C-SiC films during the epitaxial growth processFU, Xiao-An; ZORMAN, Christian A; MEHREGANY, Mehran et al.Journal of the Electrochemical Society. 2004, Vol 151, Num 12, pp G910-G914, issn 0013-4651Article

Development of Nickel Wire Bonding for High-Temperature Packaging of SiC DevicesBURLA, Ravi K; LI CHEN; ZORMAN, Christian A et al.IEEE transactions on advanced packaging. 2009, Vol 32, Num 2, pp 564-574, issn 1521-3323, 11 p.Article

Micro-and nanomechanical structures for silicon carbide MEMS and NEMSZORMAN, Christian A; PARRO, Rocco J.Physica status solidi. B. Basic research. 2008, Vol 245, Num 7, pp 1404-1424, issn 0370-1972, 21 p.Article

Doped polycrystalline 3C-SiC films with low stress for MEMS: part II. Characterization using micromachined structuresTREVINO, Jacob; FU, Xiao-An; MEHREGANY, Mehran et al.Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 6, issn 0960-1317, 065001.1-065001.8Article

Doped polycrystalline 3C―SiC films with low stress for MEMS: part I. Deposition conditions and film propertiesFU, Xiao-An; TREVINO, Jacob; MEHREGANY, Mehran et al.Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 3, issn 0960-1317, 035013.1-035013.7Article

Silicon carbide MEMS-resonator-based oscillatorYOUNG, Darrin J; ENGIN PEHLIVANOGLU, I; ZORMAN, Christian A et al.Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 11, issn 0960-1317, 115027.1-115027.10Article

Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor depositionFU, Xiao-An; DUNNING, Jeremy L; ZORMAN, Christian A et al.Thin solid films. 2005, Vol 492, Num 1-2, pp 195-202, issn 0040-6090, 8 p.Article

Polycrystalline silicon-carbide surface-micromachined vertical resonators-Part I: Growth study and device fabricationWISER, Robert F; CHUNG, Juyong; MEHREGANY, Mehran et al.Journal of microelectromechanical systems. 2005, Vol 14, Num 3, pp 567-578, issn 1057-7157, 12 p.Article

Silicon carbide micro- and nanoelectromechanical systemsMEHREGANY, Mehran; ZORMAN, Christian A.SPIE proceedings series. 2004, pp 1-7, isbn 0-8194-5250-5, 7 p.Conference Paper

Diamond-on-Polymer Microelectrode Arrays Fabricated Using a Chemical Release Transfer ProcessHESS, Allison E; SABENS, David M; MARTIN, Heidi B et al.Journal of microelectromechanical systems. 2011, Vol 20, Num 4, pp 867-875, issn 1057-7157, 9 p.Article

Mechanical properties of epitaxial 3C silicon carbide thin filmsJACKSON, Kamili M; DUNNING, Jeremy; ZORMAN, Christian A et al.Journal of microelectromechanical systems. 2005, Vol 14, Num 4, pp 664-672, issn 1057-7157, 9 p.Article

Silicon carbide micro- and nanoelectromechanical systemsMEHREGANY, Mehran; ZORMAN, Christian A.SPIE proceedings series. 2004, pp xxv-xxxi, isbn 0-8194-5252-1Conference Paper

Mechanically adaptive nanocomposites for neural interfacing : Materials for Neural InterfacesCAPADONA, Jeffrey R; TYLER, Dustin J; ZORMAN, Christian A et al.MRS bulletin. 2012, Vol 37, Num 6, pp 581-589, issn 0883-7694, 9 p.Article

Silicon carbide micro- and nanoelectromechanical systemsMEHREGANY, Mehran; ZORMAN, Christian A.SPIE proceedings series. 2004, pp xxv-xxxi, isbn 0-8194-5251-3Conference Paper

Polycrystalline Silicon-Carbide Surface-Micromachined vertical resonators-Part II: Electrical testing and material property extractionWISER, Robert F; TABIB-AZAR, Massood; MEHREGANY, Mehran et al.Journal of microelectromechanical systems. 2005, Vol 14, Num 3, pp 579-589, issn 1057-7157, 11 p.Article

Silicon carbide micro- and nanoelectromechanical systemsMEHREGANY, Mehran; ZORMAN, Christian A.SPIE proceedings series. 2004, pp xxiii-xxiv, isbn 0-8194-5256-4Conference Paper

Basal lamina secreted by MDCK cells has size- and charge-selective propertiesFERRELL, Nicholas; GROSZEK, Joseph; LINGYAN LI et al.American journal of physiology. Renal physiology. 2011, Vol 69, Num 1, issn 1931-857X, F86-F90Article

Amorphous SiC as a structural layer in microbridge-based RF MEMS switches for use in software-defined radioPARRO, Rocco J; SCARDELLETTI, Maximilian C; VARALJAY, Nicholas C et al.Solid-state electronics. 2008, Vol 52, Num 10, pp 1647-1651, issn 0038-1101, 5 p.Conference Paper

Microscale Characterization of a Mechanically Adaptive Polymer Nanocomposite With Cotton-Derived Cellulose Nanocrystals for Implantable BioMEMSHESS-DUNNING, Allison E; TYLER, Dustin J; HARRIS, James P et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 774-784, issn 1057-7157, 11 p.Article

Mechanical properties of a 3C-SiC film between room temperature and 600 °CPOZZI, Michele; HASSAN, Musaab; MEHREGANY, Mehran et al.Journal of physics. D, Applied physics (Print). 2007, Vol 40, Num 11, pp 3335-3342, issn 0022-3727, 8 p.Article

Development of amorphous SiC for MEMS-based microbridgesSUMMERS, James B; SCARDELLETTI, Maximilian; PARRO, Rocco et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 64640H.1-64640H.12, issn 0277-786X, isbn 978-0-8194-6577-1, 1VolConference Paper

Removal of endotoxin from deionized water using micromachined silicon nanopore membranesSMITH, Ross A; GOLDMAN, Ken; FISSELL, William H et al.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 5, issn 0960-1317, 054029.1-054029.8Article

Molecular conformation and filtration properties of anionic FicollGROSZEK, Joseph; LINGYAN LI; FERRELL, Nicholas et al.American journal of physiology. Renal physiology. 2010, Vol 68, Num 4, issn 1931-857X, F752-F757Article