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Design, test, and microfabrication of MEMS and MOEMS (Paris, 30 March - 1 April 1999)Courtois, Bernard; Crary, Selden B; Ehrfeld, Wolfgang et al.SPIE proceedings series. 1999, isbn 0-8194-3154-0, 2Vol, XIV, 1192 p, isbn 0-8194-3154-0Conference Proceedings
