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Micromachining technology for micro-optics and nano-optics V and Microfabrication process technology XII (22-24 January 2007, San Jose, California, USA)Perez-Maher, Mary Ann.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6575-7, 1Vol, various pagings, isbn 978-0-8194-6575-7Conference Proceedings
