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Advances in resist materials and processing technology XXIV (26-28 February, 2007, San Jose, California, USA)Lin, Qinghuang.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6638-9, 2 vol, isbn 978-0-8194-6638-9Conference Proceedings
