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Smart sensors, actuators, and MEMS III (2-4 May 2007, Maspalomas, Gran Canaria, Spain)Becker, Thomas; Cané, Carles; Barker, Nicolas Scott et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6717-1, 1Vol, various pagings, isbn 978-0-8194-6717-1Conference Proceedings
