kw.\*:("A1. Heat transfer; A1. Magnetic fields; A2. Siemens process; B2. Semiconducting silicon")
Results 1 to 1 of 1
Selection :
Temperature homogeneity of polysilicon rods in a Siemens reactorDEL COSO, G; TOBIAS, I; CANIZO, C et al.Journal of crystal growth. 2007, Vol 299, Num 1, pp 165-170, issn 0022-0248, 6 p.Article
