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Correction of coherence gate curvature in high numerical aperture optical coherence imagingGRAF, Benedikt W; ADIE, Steven G; BOPPART, Stephen A et al.Optics letters. 2010, Vol 35, Num 18, pp 3120-3122, issn 0146-9592, 3 p.Article

Research on Special Type Vertical Illumination System of MetalloscopeXIAO RAN; XIAO, Ze-Xin; CAO JIE et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7849, issn 0277-786X, isbn 978-0-8194-8379-9, 78491N.1-78491N.9Conference Paper

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Remaining challenges in microlithographic optical designWILLIAMSON, David M.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 58740N.1-58740N.12, issn 0277-786X, isbn 0-8194-5879-1, 1VolConference Paper

High Numerical Aperture Line Scanning SystemRONGGUANG LIANG.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66680I.1-66680I.10, issn 0277-786X, isbn 978-0-8194-6816-1, 1VolConference Paper

Extreme ring fields in microlithographyEPPLE, Alexander.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6427-9, Part 2, 63421R.-63421R.9Conference Paper

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The study on utilization ratio of light energy for the coupling between extended source and optical fiber and monochromatorHUANG, Zuo-Hua; HE, Zhen-Jiang; WANG, Xi-Dong et al.SPIE proceedings series. 2005, pp 583-591, isbn 0-8194-5597-0, 9 p.Conference Paper

Low Polarization Microscope ObjectivesDAUGHERTY, Brian; CHIPMAN, Russell.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7652, issn 0277-786X, isbn 978-0-8194-8082-8 0-8194-8082-7, 76521S.1-76521S.8, 2Conference Paper

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Study of angular and position stability in optical trap of a nanorodBAREIL, Paul B; YUNLONG SHENG.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7762, issn 0277-786X, isbn 978-0-8194-8258-7, 1Vol, 77621A.1-77621A.8Conference Paper

193 nm Angle-Resolved Scatterfield Microscope for Semiconductor MetrologyJOON SOHN, Yeung; QUINTANILHA, Richard; BARNES, Bryan M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7405, issn 0277-786X, isbn 978-0-8194-7695-1 0-8194-7695-1, 1Vol, 74050R.1-74050R.8Conference Paper

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