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A tilting micromirror with well-controlled digital angle through constrained lever structureCHIOU, J. C; KUO, C. F; LIN, Y. C et al.SPIE proceedings series. 2004, pp 159-165, isbn 0-8194-5378-1, 7 p.Conference Paper

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A methodology and model for the pull-in parameters of electrostatic actuatorsNEMIROVSKY, Yael; BOCHOBZA-DEGANI, Ofir.Journal of microelectromechanical systems. 2001, Vol 10, Num 4, pp 601-615, issn 1057-7157Article

A vertical electrostatic actuator with extended digital range via tailored topologyYANHANG ZHANG; DUNN, Martin L.SPIE proceedings series. 2002, pp 147-156, isbn 0-8194-4448-0Conference Paper

Nested folded-beam suspensions with low longitudinal stiffness for comb-drive actuatorsHOU, Max T; HUANG, Ming-Xian; CHANG, Chao-Min et al.Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 12, issn 0960-1317, 125022.1-125022.9Article

Low-insertion-loss optical matrix switch using MEMS micromirrors assembled by passive alignmentKAZAMA, Atsushi; ITOU, Yasuhiro; HORINO, Masaya et al.JSME international journal. Series B, fluids and thermal engineering. 2004, Vol 47, Num 3, pp 501-507, issn 1340-8054, 7 p.Article

A high-stroke, high-pressure electrostatic actuator for valve applicationsVAN DER WIJNGAART, Wouter; ASK, Häkan; ENOKSSON, Peter et al.Sensors and actuators. A, Physical. 2002, Vol 100, Num 2-3, pp 264-271, issn 0924-4247, 8 p.Article

Dual-mode micromirrors for optical phased array applicationsKRISHNAMOORTHY, U; LI, K; YU, K et al.Sensors and actuators. A, Physical. 2002, Vol 97-98, pp 21-26, issn 0924-4247, 6 p.Conference Paper

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Investigation of charge accumulation in the dielectric for robust RF MEMS switchesXUYUAN CHEN; HANKE, Ulrik; HAISHENG SAN et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 68360H.1-68360H.14, issn 0277-786X, isbn 978-0-8194-7011-9Conference Paper

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