A double-sided single-chip wireless pressure sensorDEHENNIS, Andrew; WISE, Kensall D.Proceedings, IEEE micro electro mechanical systems. 2002, pp 252-255, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Micromachined CMOS magnetic field sensors with low-noise signal conditioningBEROULLE, Vincent; BERTRAND, Yves; LATORRE, Laurent et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 256-259, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Cmos single-chip multisensor gas detection systemHAGLEITNER, C; LANGE, D; KERNESS, N et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 244-247, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Underwater shear-stress sensorYONG XU; FUKANG JIANG; QIAO LIN et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 340-343, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Anisotropy of the piezojunction effect in silicon transistorsCREEMER, J. F; FRENCH, P. J.Proceedings, IEEE micro electro mechanical systems. 2002, pp 316-319, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Combined -Pirani/bending membrane- pressure sensorVAN BAAR, J. J; WIEGERINK, R. J; LAMMERINK, T. S. J et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 328-331, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Six-degree of freedom micro force-moment sensor for application in geophysicsDZUNG VIET DAO; TORIVAMA, Toshivuki; WELLS, John et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 312-315, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Temperature control of CMOS micromachined sensorsLAKDAWALA, Hasnain; FEDDER, Gary K.Proceedings, IEEE micro electro mechanical systems. 2002, pp 324-327, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Magnetic actuation and MOS-transistor sensing for CMOS-integrated resonatorsLANGE, D; HAGLEITNER, C; HERZOG, C et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 304-307, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

LEd-SpEC: Spectroscopic detection of water contaminants using glow discharges from liquid microelectrodesWILSON, Chester G; GIANCHANDANI, Yogesh B.Proceedings, IEEE micro electro mechanical systems. 2002, pp 248-251, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Hybrid mounted micromachined aluminium hot-wire for near-wall turbulence measurementsHAASL, Sjoerd; MUCHA, Dirk; CHERNORAY, Valery et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 336-339, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

A new type of tactile sensor detecting contact force and hardness of an objectSHIMIZU, T; SHIKIDA, M; SATO, K et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 344-347, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

SU-8 based piezoresistive mechanical sensorTHAYSEN, J; YALCINKAYA, A. D; VESTERGAARD, R. K et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 320-323, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Dynamic response and shock resistance of ferromagnetic micromechanical magnetometersK.YEE, Jeffrey; YANG, Henry H; JUDY, Jack W et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 308-311, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

A surface micromachined, out-of-plane anemometerCHEN, Jack; JUN ZOU; CHANG LIU et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 332-335, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

An integrated fizeau-type interferometric displacement sensor for a feedback-controlled actuation systemHIGURASHI, E; SAWADA, R.Proceedings, IEEE micro electro mechanical systems. 2002, pp 348-351, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Colloquium on Micro-ProductionKRAFT, Oliver; MICHEL, Bernd.Microsystem technologies. 2008, Vol 14, Num 12, issn 0946-7076, 230 p.Conference Proceedings

Control issues for microelectromechanical systemsBOROVIC, B; LEWIS, F. L; MCCULLEY, W et al.IEEE control systems. 2006, Vol 26, Num 2, pp 18-21, issn 1066-033X, 4 p.Article

MEMS microdisplays : overview and marketsBOUCHAUD, Jérémie; NOWAK, Olivier.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 618605.1-618605.9, issn 0277-786X, isbn 0-8194-6242-X, 1VolConference Paper

Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2011COURTOIS, Bernard; MICHEL, Bernd.Microsystem technologies. 2012, Vol 18, Num 11, issn 0946-7076, 185 p.Serial Issue

Fiber alignment analysis of a receiver with integrated MEMS VOACHAO WANG; HICKEY, Ryan; IRWIN, Rob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63521Q.1-63521Q.8, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

MEMS / MOEMS technologies and applications II (Beijing, 10-12 November 2004)Zhichun Ma; Guofan Jin; Xuyuan Chen et al.SPIE proceedings series. 2004, isbn 0-8194-5596-2, XI, 364 p, isbn 0-8194-5596-2Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2003 (DTIP 2003)Bergman, Keren.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2003, isbn 0-7803-7066-X, 1Vol, XI-411 p, isbn 0-7803-7066-XConference Proceedings

BioMEMS and smart nanostructures (Adelaide, 17-19 December 2001)Kish, Laszlo B; Harvey, Erol C; Spillman, William B et al.SPIE proceedings series. 2001, isbn 0-8194-4320-4, XI, 362 p, isbn 0-8194-4320-4Conference Proceedings

MEMS microdisplays : overview and marketsBOUCHIUD, Jérémie; WICHT, Henning.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 611406.1-611406.8, issn 0277-786X, isbn 0-8194-6156-3, 1VolConference Paper