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Design of large deflection electrostatic actuatorsGRADE, John D; JERMAN, Hal; KENNY, Thomas W et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 3, pp 335-343, issn 1057-7157, 9 p.Article

Micromechanical resonators with submicron capacitive gaps in 2 μm processSHAO, L. C; PALANIAPAN, M; KHINE, L et al.Electronics Letters. 2007, Vol 43, Num 25, pp 1427-1428, issn 0013-5194, 2 p.Article

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A vertical electrostatic actuator with extended digital range via tailored topologyYANHANG ZHANG; DUNN, Martin L.SPIE proceedings series. 2002, pp 147-156, isbn 0-8194-4448-0Conference Paper

A 2-DOF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFMFOWLER, A. G; LASKOVSKI, A. N; HAMMOND, A. C et al.Journal of microelectromechanical systems. 2012, Vol 21, Num 4, pp 771-773, issn 1057-7157, 3 p.Article

A High Dynamic Restoring Force Electrostatic ActuatorGUPTA, Arun K; FLETCHER, Mark K; LEE, Jeong-Bong et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1032-1040, issn 1057-7157, 9 p.Article

Torque multiplication and stable range tradeoff in parallel plate angular electrostatic actuators with fixed DC biasPAREEK, Ajay; DOKMECI, Mehmet R; BAKSHI, Shivalik et al.Journal of microelectromechanical systems. 2005, Vol 14, Num 6, pp 1217-1222, issn 1057-7157, 6 p.Article

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Miniature Flipping Disk Device for Size Measurement of Objects Through EndoscopeCHOI, Wook; RUBTSOV, Vladimir; KIM, Chang-Jin et al.Journal of microelectromechanical systems. 2012, Vol 21, Num 4, pp 926-933, issn 1057-7157, 8 p.Article

On Characterizing Microelectromechanical Processes Using Coupled ResonatorsCHOUBEY, Bhaskar; COLLINS, Steve; WARD, Mike et al.Journal of microelectromechanical systems. 2012, Vol 21, Num 4, pp 791-800, issn 1057-7157, 10 p.Article