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Current status of water immersion lithography and prospect of higher index methodOWA, Soichi; NAKANO, Katsushi; NAGASAKA, Hiroyuki et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 653304.1-653304.5, issn 0277-786X, isbn 978-0-8194-6655-6Conference Paper

Investigation of aberration measurement in confocal microscopyZHOU, H; GU, M; SHEPPARD, C. J. R et al.Journal of modern optics (Print). 1995, Vol 42, Num 3, pp 627-638, issn 0950-0340Article

Design of Resist Stacks with Antireflection Coatings from the Viewpoint of Focus BudgetNAGAI, Satoshi; SATO, Kazuya.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7274, issn 0277-786X, isbn 978-0-8194-7527-5 0-8194-7527-0, 72741H.1-72741H.10, 2Conference Paper

Novel depolymerizable topcoat for immersion lithographyPENG ZHANG; WEIGEL, Scott J; BRAYMER, Tom et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6196-2, 2Vol, Part 1, 61531N.1-61531N.7Conference Paper

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Film Stacking Architecture for Immersion Lithography ProcessGOTO, Tomohiro; SANADA, Masakazu; MIYAGI, Tadashi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69222X.1-69222X.9, issn 0277-786X, isbn 978-0-8194-7107-9Conference Paper

Assurance of CD for 45 nm half-pitch with immersion microscopeYAMANE, Takeshi; TANIGUCHI, Rikiya; HIRANO, Takashi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6358-2, vol 1, 628314.1-628314.8Conference Paper

Analysis of the Effect of Point-of-Use Filtration on Microbridging DefectivityBRAGGIN, J; GRONHEID, R; CHENG, S et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7273, issn 0277-786X, isbn 978-0-8194-7526-8 0-8194-7526-2, 72730S.1-72730S.10, 2Conference Paper

L'optique en ligne de mire = Optics in the line of sightFERRARI, Thierry.Technologies internationales (Strasbourg). 2005, Num 119, pp 27-30, issn 1165-8568, 4 p.Article

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