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The fabrication of 3-D nanostructures by a low- voltage EBLSEUNG HUN OH; JAE GU KIM; CHANG SEOK KIM et al.Applied surface science. 2011, Vol 257, Num 9, pp 3817-3823, issn 0169-4332, 7 p.Article

A resist for electric imprint lithographyYONG SIK AHN; YONG CHEN; HAHN, H. Thomas et al.Microelectronic engineering. 2009, Vol 86, Num 3, pp 392-396, issn 0167-9317, 5 p.Article

Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writingTANABE, Yusuke; NISHIKAWA, Hiroyuki; SEKI, Yoshihiro et al.Microelectronic engineering. 2011, Vol 88, Num 8, pp 2145-2148, issn 0167-9317, 4 p.Conference Paper

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Process control for 32 nm imprint masks using variable shape beam pattern generatorsTHOMPSON, Ecron; SELINIDIS, Kosta; MALTABES, John G et al.Microelectronic engineering. 2009, Vol 86, Num 4-6, pp 709-713, issn 0167-9317, 5 p.Conference Paper

Template fabrication for the 32 nm node and beyondSCHMID, Gerard M; THOMPSON, Ecron; STACEY, Nick et al.Microelectronic engineering. 2007, Vol 84, Num 5-8, pp 853-859, issn 0167-9317, 7 p.Conference Paper

Nanoimprint lithography for a large area pattern replicationLEBIB, A; CHEN, Y; BOURNEIX, J et al.Microelectronic engineering. 1999, Vol 46, Num 1-4, pp 319-322, issn 0167-9317Conference Paper

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Selective dry etch process for step and flash imprint lithographyLE, Ngoc V; DAUKSHER, William J; GEHOSKI, Kathy A et al.Microelectronic engineering. 2005, Vol 78-79, pp 464-473, issn 0167-9317, 10 p.Conference Paper

Fine pattern fabrication on glass surface by imprint lithographyHIRAI, Y; KANAKUGI, K; YAMAGUCHI, T et al.Microelectronic engineering. 2003, Vol 67-68, pp 237-244, issn 0167-9317, 8 p.Conference Paper

Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)KETTLE, J; HOYLE, R. T; DIMOV, S et al.Microelectronic engineering. 2008, Vol 85, Num 5-6, pp 853-855, issn 0167-9317, 3 p.Conference Paper

Bioimprinting strategies: From soft lithography to biomimetic sensors and beyondMUJAHID, Adnan; IQBAL, Naseer; AFZAL, Adeel et al.Biotechnology advances. 2013, Vol 31, Num 8, pp 1435-1447, issn 0734-9750, 13 p.Article

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Molded plastic micro-cavity lasersNILSSON, D; NIELSEN, T; KRISTENSEN, A et al.Microelectronic engineering. 2004, Vol 73-74, pp 372-376, issn 0167-9317, 5 p.Conference Paper

Enhanced light extraction from Y₂O₃: Eu³⁺ phosphor films via vacuum nano-imprint lithography using spin-on dielectric materialsKILBOCK LEE; KO, Ki-Young; JINHO AHN et al.Thin solid films. 2013, Vol 547, pp 222-224, issn 0040-6090, 3 p.Conference Paper

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Nickel stamp fabrication using step & stamp imprint lithographyHAATAINEN, Tomi; MAJANDER, Päivi; RIEKKINEN, Tommi et al.Microelectronic engineering. 2006, Vol 83, Num 4-9, pp 948-950, issn 0167-9317, 3 p.Conference Paper

High performance direct methanol fuel cells with micro/nano-patterned polymer electrolyte membraneCHO, Yoon-Hwan; JIN WOO BAE; KIM, Ok-Hee et al.Journal of membrane science (Print). 2014, Vol 467, pp 36-40, issn 0376-7388, 5 p.Article