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Efforts for high throughput of IBAD-GZO-based substrate process for YBCO coated conductorsMIYATA, S; IBI, A; KURIKI, R et al.Physica. C. Superconductivity. 2006, Vol 445-48, pp 611-613, issn 0921-4534, 3 p.Conference Paper

Study on electron emission suppression characteristic of molybdenum grid coated with Hf film by ion beam assisted depositionJIANG, J; JIANG, B. Y; REN, C. X et al.Applied surface science. 2005, Vol 239, Num 3-4, pp 437-444, issn 0169-4332, 8 p.Article

Production of Cr-N films by ion beam-assisted deposition technology: experiment and computer simulationGUGLYA, A. G; MARCHENKO, I. G; MALYKHIN, D. G et al.Surface & coatings technology. 2003, Vol 163-64, pp 286-292, issn 0257-8972, 7 p.Conference Paper

Electrical properties of Ta_xN_y films by implementing OES in the sputtering systemLU, Y. M; WENG, R. J; HWANG, W. S et al.Materials chemistry and physics. 2001, Vol 72, Num 2, pp 278-280, issn 0254-0584Conference Paper

Analysis of focused ion beam implantation of semiconductors by thermal microscopyDIETZEL, D; RÖCKEN, H; PELZL, J et al.Surface & coatings technology. 2001, Vol 142-44, pp 429-436, issn 0257-8972Conference Paper

Synthesizing crystalline carbon nitrides by using two different bio-molecular materialsKUO, Cheng-Tzu; WU, Jin-Yu; LU, Tien-Rong et al.Materials chemistry and physics. 2001, Vol 72, Num 2, pp 251-257, issn 0254-0584Conference Paper

Annealing characteristics of the vanadium oxide films prepared by modified ion beam enhanced depositionJINHUA LI; NINGYI YUAN; JIANSHENG XIE et al.Applied surface science. 2005, Vol 243, Num 1-4, pp 437-442, issn 0169-4332, 6 p.Article

Broad fast neutral molecule beam sources for industrial-scale beam-assisted depositionGRIGORIEV, Sergei; MELNIK, Yuri; METEL, Alexander et al.Surface & coatings technology. 2002, Vol 156, Num 1-3, pp 44-49, issn 0257-8972Conference Paper

Ionization of hexamethyldisilane for SiC depositionTAKEUCHI, Takae; TANAKA, Motoko; MATSUTANIB, Takaomi et al.Surface & coatings technology. 2002, Vol 158-59, pp 408-411, issn 0257-8972Conference Paper

Preferential orientation of high permittivity TiO₂ deposited on si wafers by an IBAD techniqueYOKOTA, Katsuhiro; NAKAMURA, Kazuhiro; YANO, Yoshinori et al.Surface & coatings technology. 2002, Vol 158-59, pp 573-576, issn 0257-8972Conference Paper

The Role of Ion-assisted Deposition in PVDMA, Z. Q; FENG, C. B; TANG, X et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 698420.1-698420.4, issn 0277-786X, isbn 978-0-8194-7182-6, 1VolConference Paper

Carbon films deposited with mass-selected carbon ion beams under substrate heatingYAMAMOTO, Kazuhiro; WATANABE, Toshiya; WAZUMI, Koichiro et al.Surface & coatings technology. 2003, Vol 169-70, pp 328-331, issn 0257-8972, 4 p.Conference Paper

HfO₂ thin films prepared by ion beam assisted depositionMORI, Takanori; FUJIWARA, Makoto; MANORY, Rafael R et al.Surface & coatings technology. 2003, Vol 169-70, pp 528-531, issn 0257-8972, 4 p.Conference Paper

Characteristics of polycrystalline silicon thin films prepared by pulsed ion-beam evaporationYANG, Sung-Chae; FAZLAT, Ali; SUEMATSU, Hisayuki et al.Surface & coatings technology. 2003, Vol 169-70, pp 636-638, issn 0257-8972, 3 p.Conference Paper

Preparation of biaxially textured CeO₂ buffer layers by ion beam-assisted depositionWANG, J; FROMKNECHT, R; LINKER, G et al.Surface & coatings technology. 2002, Vol 158-59, pp 548-551, issn 0257-8972Conference Paper

Structural modifications of hafnium oxide films prepared by ion beam assisted deposition under high energy oxygen irradiationMIYAKE, Shoji; SHIMIZU, Ippei; MANORY, Rafael R et al.Surface & coatings technology. 2001, Vol 146-47, pp 237-242, issn 0257-8972Conference Paper

Effect of substrate roughness on IBAD-GZO template layerKANEKO, N; IIJIMA, Y; HANYU, S et al.Physica. C. Superconductivity. 2006, Vol 445-48, pp 608-610, issn 0921-4534, 3 p.Conference Paper

Preparation of hydroxyapatite layer by ion beam assisted simultaneous vapor depositionHAMDI, M; IDE-EKTESSABI, A.Surface & coatings technology. 2003, Vol 163-64, pp 362-367, issn 0257-8972, 6 p.Conference Paper

Ion beam-assisted deposition of magnesium oxide thin film for PDP applicationsIDE-EKTESSABI, Ari; NOMURA, Hiroshi; YASUI, Nobuto et al.Surface & coatings technology. 2003, Vol 163-64, pp 728-733, issn 0257-8972, 6 p.Conference Paper

Improvement of Ta barrier film properties in Cu interconnection by using a non-mass separated ion beam deposition methodLIM, Jae-Won; ISHIKAWA, Yukio; MIYAKE, Kiyoshi et al.Materials transactions - JIM. 2002, Vol 43, Num 3, pp 478-481, issn 0916-1821Conference Paper

Nanostructures formations, electrical transitions and implanted impurity migration in α-alumina modified by Ti ion beam assisted W deposition and subsequent thermal annealingDUVANOV, Sergei M; KABYSHEV, Alexander V; BALOGH, Adam G et al.Surface & coatings technology. 2002, Vol 158-59, pp 120-124, issn 0257-8972Conference Paper