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Messtechnische Erfassung der Bildleistung photolithographischer Objektive durch Wellenflächenanalyse = Estimation métrologique des performances image en photolithogravure par analyse du front d'onde = Metrological assessment of the imaging performance of photolithographic objectives by wave front analysisFREITAG, W; GROSSMANN, W; GRUNEWALD, U et al.Experimentelle Technik der Physik. 1988, Vol 36, Num 6, pp 417-428, issn 0014-4924Article

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Optical microlithography XXII (24-27 February 2009, San Jose, California, United States)Levinson, Harry J; Dusa, Mircea V.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7274, issn 0277-786X, isbn 978-0-8194-7527-5 0-8194-7527-0, 2 vol, 2, isbn 978-0-8194-7527-5 0-8194-7527-0Conference Proceedings

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Photolithography at 193 nmROTHSCHILD, M; GOODMAN, R. B; HARTNEY, M. A et al.Journal of vacuum science & technology. B. Microelectronics and nanometer structures. Processing, measurement and phenomena. 1992, Vol 10, Num 6, pp 2989-2996, issn 1071-1023Conference Paper

Limits of optical lithographyWILCZYNSKI, J. S.Polymer engineering and science. 1986, Vol 26, Num 16, issn 0032-3888, 1145Article

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Development of SMD 32.768 kHz tuning fork type crystals Part III : Design optimization of mass-production capable quartz tuning fork resonatorsLEE, Sungkyu; MOON, Yangho; SEO, Won-Seon et al.International journal of materials research. 2007, Vol 98, Num 3, pp 239-245, issn 1862-5282, 7 p.Article

Advances in resist materials and processing technology XXVII (22-24 February 2010, San Jose, California, United States)Allen, Robert D; Somervell, Mark Howell.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7639, issn 0277-786X, isbn 978-0-8194-8053-8 0-8194-8053-3, 2 vol, 2, isbn 978-0-8194-8053-8 0-8194-8053-3Conference Proceedings

Optical microlithography XXI (26-29 February 2008, San Jose, California, USA)Levinson, Harry J; Dusa, Mircea V.Proceedings of SPIE, the International Society for Optical Engineering. 2008, issn 0277-786X, isbn 978-0-8194-7109-3, 3 v, isbn 978-0-8194-7109-3Conference Proceedings

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Microparticles of all shapes and chemistriesMUKHOPADHYAY, Rajendrani.Analytical chemistry (Washington, DC). 2006, Vol 78, Num 13, pp 4247-4247, issn 0003-2700, 1 p.Article

Optical microlithography XXIV (1-3 March 2011, San Jose, California, United States)Dusa, Mircea V.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7973, issn 0277-786X, isbn 978-0-8194-8532-8, 2 vol, 2, isbn 978-0-8194-8532-8Conference Proceedings

Extreme ultraviolet (EUV) lithography (22-25 February 2010, San Jose, California, United States)La Fontaine, Bruno M.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7636, issn 0277-786X, isbn 978-0-8194-8050-7 0-8194-8050-9, 2 vol, 2, isbn 978-0-8194-8050-7 0-8194-8050-9Conference Proceedings

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