kw.\*:("micromachining")
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A novel piezoelectric-based RF BAW filterPENG CONG; REN, Tian-Ling; LIU, Li-Tian et al.Microelectronic engineering. 2003, Vol 66, Num 1-4, pp 779-784, issn 0167-9317, 6 p.Conference Paper
Femtosecond laser micromachining with extended depth of focus by using diffractive lensesTORRES-PEIRO, S; GONZALEZ-AUSEJO, J; MENDOZA-YERO, O et al.Applied surface science. 2014, Vol 303, pp 393-398, issn 0169-4332, 6 p.Article
Laser milling as a 'rapid' micromanufacturing processPHAM, D. T; DIMOV, S. S; JI, C et al.Proceedings of the Institution of Mechanical Engineers. Part B. Journal of engineering manufacture. 2004, Vol 218, Num 1, pp 1-7, issn 0954-4054, 7 p.Article
Design space of single-loop planar folded micro mechanisms with out-of-plane motionLUSK, Craig P; HOWELL, Larry L.Journal of mechanical design (1990). 2006, Vol 128, Num 5, pp 1092-1100, issn 1050-0472, 9 p.Article
Optical detection of the Coriolis force on a silicon micromachined gyroscopeANNOVAZZI-LODI, Valerio; MERLO, Sabina; NORGIA, Michele et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 5, pp 540-549, issn 1057-7157, 10 p.Article
Laser microstructuring for fabricating superhydrophobic polymeric surfacesCARDOSO, M. R; TRIBUZI, V; BALOGH, D. T et al.Applied surface science. 2011, Vol 257, Num 8, pp 3281-3284, issn 0169-4332, 4 p.Article
A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirrorZHILI HAO; WINGFIELD, Brian; WHITLEY, Michael et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 5, pp 692-701, issn 1057-7157, 10 p.Article
Vertical Comb array microactuatorsSELVAKUMAR, Arjun; NAJAFI, Khalil.Journal of microelectromechanical systems. 2003, Vol 12, Num 4, pp 440-449, issn 1057-7157, 10 p.Article
Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantileversPHINNEY, Leslie M; ROGERS, James W.Journal of adhesion science and technology. 2003, Vol 17, Num 4, pp 603-622, issn 0169-4243, 20 p.Article
Characterization of micromachined silicon rectangular waveguide at 400 GHzKIRBY, P. L; PUKALA, D; MANOHARA, H et al.IEEE microwave and wireless components letters. 2006, Vol 16, Num 6, pp 366-368, issn 1531-1309, 3 p.Article
High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gapsPOURKAMALI, Siavash; HASHIMURA, Akinori; ABDOLVAND, Reza et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 4, pp 487-496, issn 1057-7157, 10 p.Article
Nanometrological micromachined artefactsENSELL, G; EVANS, A; FAROOQUI, M et al.Journal of micromechanics and microengineering (Print). 1992, Vol 2, Num 3, pp 179-180, issn 0960-1317Article
A study of the undercutting characteristics in the TMAH-IPA systemMERLOS, A; ACERO, M. C; BAO, M. H et al.Journal of micromechanics and microengineering (Print). 1992, Vol 2, Num 3, pp 181-183, issn 0960-1317Article
Generation and characterization of polymeric tridimensional microstructures for micromachine applicationMOUSINHO, A. P; MANSANO, R. D; DE ARRUDA, A. C. S et al.Microelectronics journal. 2003, Vol 34, Num 5-8, pp 651-653, issn 0959-8324, 3 p.Conference Paper
Novel flow control concepts in microchannelsFUSHINOBU, Kazuyoshi; TOKUSHIGE, Masaya; NAKATA, Masashi et al.InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems. 2004, isbn 0-7803-8357-5, Vol2, 622-628Conference Paper
High density plasma chemical vapor deposition of diamond-like carbon filmsMOUSINHO, A. P; MANSANO, R. D; MASSI, M et al.Microelectronics journal. 2003, Vol 34, Num 5-8, pp 627-629, issn 0959-8324, 3 p.Conference Paper
Non-linear techniques for increasing harvesting energy from piezoelectric and electromagnetic micro-power-generatorsAMMAR, Yasser; BASROUR, Skandar.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2006, pp 344-348, isbn 2-916187-03-0, 5 p.Conference Paper
Direct patterning of microelectrode arrays using femtosecond laser micromachiningHAYDEN, C. J; DALTON, C.Applied surface science. 2010, Vol 256, Num 12, pp 3761-3766, issn 0169-4332, 6 p.Article
A high-sensitivity silicon accelerometer with a folded-electrode structureYAZDI, Navid; NAJAFI, Khalil; SALIAN, Arvind S et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 4, pp 479-486, issn 1057-7157, 8 p.Article
Conductive aluminum line formation on aluminum nitride surface by infrared nanosecond laserKOZIOL, Paweł E; ANTONCZAK, Arkadiusz J; SZYMCZYK, Patrycja et al.Applied surface science. 2013, Vol 287, pp 165-171, issn 0169-4332, 7 p.Article
Effects of laser operating parameters on metals micromachining with ultrafast lasersCHENG, J; PERRIE, W; EDWARDSON, S. P et al.Applied surface science. 2010, Vol 256, Num 5, pp 1514-1520, issn 0169-4332, 7 p.Article
Vertically laminated magnetic cores by electroplating Ni-Fe into micromachined SiARNOLD, David P; ZANA, Iulica; CROS, Florent et al.IEEE transactions on magnetics. 2004, Vol 40, Num 4, pp 3060-3062, issn 0018-9464, 3 p., 2Conference Paper
Micro/nanofactory : Concept and state of the artBREGUET, Jean-Marc; SCHMITT, Carl; CLAVEL, Reymond et al.SPIE proceedings series. 2000, pp 1-12, isbn 0-8194-3859-6Conference Paper
Production of micro components by micro powder injection moldingLIU, Z. Y; LOH, N. H; TOR, S. B et al.Journal of materials science letters. 2001, Vol 20, Num 4, pp 307-309, issn 0261-8028Article
Microsystems engineeringCOLLINS, Scott D.SPIE proceedings series. 2001, pp 214-222, isbn 0-8194-4020-5Conference Paper