Preliminary results on the use of mirror for LIGA processMEGTERT, S; PANTENBURG, F. J; ACHENBACH, S et al.SPIE proceedings series. 1999, pp 917-923, isbn 0-8194-3154-0, 2VolConference Paper

Micro moulding behaviour of engineering plasticsKEMMANN, O; SCHAUMBURG, C; WEBER, L et al.SPIE proceedings series. 1999, pp 464-471, isbn 0-8194-3154-0, 2VolConference Paper

Polymeric optical MEMSHOSSFELD, J; PAATZSCH, T; SCHULZE, J et al.SPIE proceedings series. 1999, pp 637-645, isbn 0-8194-3154-0, 2VolConference Paper

Conventional micromachining for microassembly applicationsEBERHARDT, R; GEBHARDT, A; SCHELLER, T et al.SPIE proceedings series. 1999, pp 687-695, isbn 0-8194-3154-0, 2VolConference Paper

Infrastructure for Micro-System productionVAN HEEREN, H; SANCHEZ, S; ELDERS, J et al.SPIE proceedings series. 1999, pp 740-747, isbn 0-8194-3154-0, 2VolConference Paper

MOEMS at LETIMOTTIER, P; OLLIER, E; POUTEAU, P et al.SPIE proceedings series. 1999, pp 655-665, isbn 0-8194-3154-0, 2VolConference Paper

Measurement of surface profile of microstructureMINGBAO ZHOU; LINBO BAI; ZHAN LI et al.SPIE proceedings series. 1999, pp 863-869, isbn 0-8194-3154-0, 2VolConference Paper

MEMS for space applicationsMILLER, L. M.SPIE proceedings series. 1999, pp 2-11, isbn 0-8194-3154-0, 2VolConference Paper

Fault simulation of MEMS using HDLsCHARLOT, B; MIR, S; COTA, E. F et al.SPIE proceedings series. 1999, pp 70-77, isbn 0-8194-3154-0, 2VolConference Paper

Electrochemical etching of silicon in aqueous solutionsSTAROSVETSKY, D; KOVLER, M; YAHALOM, J et al.SPIE proceedings series. 1999, pp 1083-1090, isbn 0-8194-3154-0, 2VolConference Paper

Optimization of TMAH etching for MEMSBRIDA, S; FERRARIO, L; GUARNIERI, V et al.SPIE proceedings series. 1999, pp 969-976, isbn 0-8194-3154-0, 2VolConference Paper

Design of MEMS and microsystemsNAGEL, D. J.SPIE proceedings series. 1999, pp 20-29, isbn 0-8194-3154-0, 2VolConference Paper

Electrochemical microreactorGHEORGHE, M; DASCALU, D; GHITA, M et al.SPIE proceedings series. 1999, pp 1159-1163, isbn 0-8194-3154-0, 2VolConference Paper

Providing technology infrastructure for MEMSRIBAS, R. P; VEYCHARD, D; KARAM, J. M et al.SPIE proceedings series. 1999, pp 298-305, isbn 0-8194-3154-0, 2VolConference Paper

Manufacturing of microstructures using ultraprecision machine toolsWECK, M; FISCHER, S.SPIE proceedings series. 1999, pp 450-455, isbn 0-8194-3154-0, 2VolConference Paper

Characterisation of on-chip coils for RF-microsystemsWESER, M; BINDER, J; REHFUSS, S et al.SPIE proceedings series. 1999, pp 708-715, isbn 0-8194-3154-0, 2VolConference Paper

Optical microsystems with microchip lasers and microopticsFULBERT, L; MOLVA, E; MARTY, J et al.SPIE proceedings series. 1999, pp 646-654, isbn 0-8194-3154-0, 2VolConference Paper

Mass separation using thin PTFE membranesRUMMLER, Z; BACHER, W; SAILE, V et al.SPIE proceedings series. 1999, pp 1014-1021, isbn 0-8194-3154-0, 2VolConference Paper

MEMS resonator synthesis for testabilityDEB, N; IYER, S. V; MUKHERJEE, T et al.SPIE proceedings series. 1999, pp 58-69, isbn 0-8194-3154-0, 2VolConference Paper

Hollow glass for insulating layersMERTICARU, A. R; MOAGAR-POLADIAN, V.SPIE proceedings series. 1999, pp 440-446, isbn 0-8194-3154-0, 2VolConference Paper

Thermal microactuator characterisationJONSMANN, J; BOUWSTRA, S.SPIE proceedings series. 1999, pp 1046-1055, isbn 0-8194-3154-0, 2VolConference Paper

Bio-mimetic photoreceptorMERTICARU, A. R.SPIE proceedings series. 1999, pp 1076-1082, isbn 0-8194-3154-0, 2VolConference Paper

Physical modeling and simulation of microdevices and microsystemsWACHUTKA, G.SPIE proceedings series. 1999, pp 12-19, isbn 0-8194-3154-0, 2VolConference Paper

Automatic evaluation of sensors geometrical parametersBLANC, J.-P; BELLEVILLE, M; MIEYEVILLE, F et al.SPIE proceedings series. 1999, pp 94-102, isbn 0-8194-3154-0, 2VolConference Paper

III-V semiconductor-based MOEMSVIKTOROVITCH, P.SPIE proceedings series. 1999, pp 30-40, isbn 0-8194-3154-0, 2VolConference Paper