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Results 1 to 25 of 135

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Fabrication, structural and electrical properties of compressively strained Ge-on-insulator substratesHARTMANN, J. M; SANCHEZ, L; CRISTOLOVEANU, S et al.Semiconductor science and technology. 2010, Vol 25, Num 7, issn 0268-1242, c-075010.11Article

Inductively coupled plasma-assisted RF magnetron sputtering deposition of boron-doped microcrystalline Si filmsHUANG, S. Y; CHENG, Q. J; XU, S et al.Journal of alloys and compounds. 2010, Vol 499, Num 2, pp 166-170, issn 0925-8388, 5 p.Article

Effect of filament and substrate temperatures on the structural and electrical properties of SiC thin films grown by the HWCVD techniqueDASGUPTA, A; HUANG, Y; HOUBEN, L et al.Thin solid films. 2008, Vol 516, Num 5, pp 622-625, issn 0040-6090, 4 p.Conference Paper

Poly-Si films with long carrier lifetime prepared by rapid thermal annealing of Cat-CVD amorphous silicon thin filmsOHDAIRA, Keisuke; ABE, Yuki; FUKUDA, Makoto et al.Thin solid films. 2008, Vol 516, Num 5, pp 600-603, issn 0040-6090, 4 p.Conference Paper

Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction techniqueAALIYA REHMAN KHAN; STANGL, J; BAUER, G et al.Semiconductor science and technology. 2007, Vol 22, Num 1, issn 0268-1242, S212-S215Conference Paper

Physical properties of diamond for thermistors and pressure transducersCHALKER, Paul R; JOHNSTON, Colin; WERNER, Matthias et al.Semiconductor science and technology. 2003, Vol 18, Num 3, pp S113-S116, issn 0268-1242Article

Atomic force microscope topographical artifacts after the dielectric breakdown of ultrathin SiO2 filmsPORTI, M; NAFRIA, M; BLÜM, M. C et al.Surface science. 2003, Vol 532-35, pp 727-731, issn 0039-6028, 5 p.Conference Paper

Ultra thin films of atomic force microscopy grown SiO2 as gate oxide on MOS structures: conduction and breakdown behaviorBLASCO, Xavier; NAFRIA, Montserrat; AYMERICH, Xavier et al.Surface science. 2003, Vol 532-35, pp 732-736, issn 0039-6028, 5 p.Conference Paper

Properties of silicon oversaturated with implanted hydrogenPOPOV, V. P; TYSCHENKO, I. E; SAFRONOV, L. N et al.Thin solid films. 2002, Vol 403-04, pp 500-504, issn 0040-6090Conference Paper

Thermal stability of B in poly-SiGe on SiONSADOH, T; FITRIANTO; KUNIGAMI, M et al.Materials science & engineering. B, Solid-state materials for advanced technology. 2002, Vol 89, Num 1-3, pp 129-132, issn 0921-5107Conference Paper

Electrical properties of low-temperature epitaxial doped Si thin films fabricated by using a sputtering-type electron cyclotron resonance plasmaJUNLI WANG; NAKASHIMA, Hiroshi; JUNSI GAO et al.Journal of physics. D, Applied physics (Print). 2001, Vol 34, Num 7, pp 1025-1031, issn 0022-3727Article

Gate oxide prepared by nanometre silicon wet oxidation at low temperature for Si/SiGe PMOSFET applicationYANG, P. F; LI, J. C; XIE, M. X et al.Semiconductor science and technology. 2001, Vol 16, Num 12, pp 972-974, issn 0268-1242Article

Plasma effects of fluorine implantation on As+-doped polycrystalline silicon thin films of various thicknessesBOR WEN LIOU; CHUNG LEN LEE.Thin solid films. 2000, Vol 379, Num 1-2, pp 213-217, issn 0040-6090Article

Transport properties of two-dimensional electron gas in a strained-Si/SiGe heterostructure at low carrier densitiesHATAKEYAMA, T; TEZUKA, T; SUGIYAMA, N et al.Thin solid films. 2000, Vol 369, Num 1-2, pp 328-332, issn 0040-6090Conference Paper

Self-assembled growth and magnetotransport investigations on strained Si/SiGe multilayers on vicinal (113)-Si surfacesNEUMANN, R; ZHU, J; BRUNNER, K et al.Thin solid films. 2000, Vol 380, Num 1-2, pp 124-126, issn 0040-6090Conference Paper

Effects of deposition and annealing conditions on the structure and electrical properties of LPCVD silicon thin filmsDAS, S; SHRIRAM, R; BHAT, K. N et al.Journal of materials science. 2000, Vol 35, Num 18, pp 4743-4746, issn 0022-2461Article

Photoconductivity of Si/Ge buffers, superlattices, and multiple quantum wellsMENZEL, D; KOSCHINSKI, W; DETTMER, K et al.Thin solid films. 1999, Vol 342, Num 1-2, pp 312-316, issn 0040-6090Article

Polycrystalline silicon thin films prepared by plasma enhanced chemical vapour deposition at 200 °C using fluorinated source gasHAZRA, S; SAHA, S. C; RAY, S et al.Journal of physics. D, Applied physics (Print). 1999, Vol 32, Num 3, pp 208-212, issn 0022-3727Article

δ-Doping in diamondKUNZE, M; VESCAN, A; DOLLINGER, G et al.Carbon (New York, NY). 1999, Vol 37, Num 5, pp 787-791, issn 0008-6223Conference Paper

Silicon quantum dot superlattice and metallic conducting behaviour in porous siliconCHEN, Q; LI, X.-J; ZHANG, S et al.Journal of physics. Condensed matter (Print). 1997, Vol 9, Num 41, pp L569-L572, issn 0953-8984Article

Effects of annealing on the electrical conductivity of C60 filmsJINLONG GONG; FANGQING ZHANG; YAHONG LI et al.Thin solid films. 1995, Vol 261, Num 1-2, pp 266-270, issn 0040-6090Article

Optical and electronic properties of SiGeC alloys grown on Si substratesKOLODZEY, J; BERGER, P. R; UNRUH, K. M et al.Journal of crystal growth. 1995, Vol 157, Num 1-4, pp 386-391, issn 0022-0248Conference Paper

The effect of passivation of boron dopants by hydrogen in nano-crystalline and micro-crystalline silicon filmsJIANG, X. L; HE, Y. L; ZHU, H. L et al.Journal of physics. Condensed matter (Print). 1994, Vol 6, Num 3, pp 713-718, issn 0953-8984Article

Electrical transport across oxygen-doped-silicon buried layers by substoichiometric oxygen ion implantation in siliconSRIKANTH, K; ASHOK, S.Applied physics letters. 1993, Vol 63, Num 23, pp 3188-3190, issn 0003-6951Article

Microstructural and electrical characterization of ion-beam-sputtered polysilicon films for microelectronic applicationsDAS, S; LAHIRI, S. K; CHAUDHURI, A. K et al.Thin solid films. 1993, Vol 235, Num 1-2, pp 215-221, issn 0040-6090Article

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