Fifth International Workshop on High Aspect Ration Micro Structure Technology, HARMST, Monterey, CA, USA, June 2003Microsystem technologies. 2005, Vol 11, Num 4-5, issn 0946-7076, 162 p.Conference Proceedings

Special issue featuring papers from the 14th Micromechanics Europe Workshop (MME'03)WOLFFENBUTTEL, R. F.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 9, issn 0960-1317, 128 p.Conference Proceedings

MOEMS and miniaturized systems X (24-26 January 2011, San Francisco, California, United States)Schenk, Harald; Wibool Piyawattanametha.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7930, issn 0277-786X, isbn 978-0-8194-8467-3, 1 vol, isbn 978-0-8194-8467-3Conference Proceedings

Matrix combination of mems relaysFABIAN, J. H; NIAVESH, K; KOTILAINEN, S et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 861-864, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Revolutionary Innovation in System Interconnection: A New Era for the ICBAKIR, Muhannad S; THADESAR, Paragkumar A; KING, Calvin et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7928, issn 0277-786X, isbn 978-0-8194-8465-9 0-8194-8465-2, 792803.1-792803.8Conference Paper

A global assessment of piezoelectric actuated micro-pumpsHERNANDEZ, C; BERNARD, Y; RAZEK, A et al.EPJ. Applied physics (Print). 2010, Vol 51, Num 2, issn 1286-0042, 20101.p1-20101.p8Article

EXPANDING THE SPACECRAFT APPLICATION BASE WITH MEMS GYROSBRADY, Tye.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7928, issn 0277-786X, isbn 978-0-8194-8465-9 0-8194-8465-2, 79280J.1-79280J.9Conference Paper

17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004 technical digest)IEEE International Conference on Micro Electro Mechanical Systems. 2004, isbn 0-7803-8265-X, 1Vol, LI-868 p, isbn 0-7803-8265-XConference Proceedings

Functional 3-D PDMS microchannels having slanted grooves embedded walls realizing spiral flowSATO, Hironobu; ITO, Seiki; TAJIMA, Kenji et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 693-696, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Nano-opto-mechanical systems (NOMS) (21 August 2011, San Diego, California, United States)Esteve, Jaume; Terentjev, Eugene Michael; Campo, Eva M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8107, issn 0277-786X, isbn 978-0-8194-8717-9, 1 vol, isbn 978-0-8194-8717-9Conference Proceedings

Design and fabrication of a MEMS mirror for Miniature Laser ProjectionSANDERS, René; VAN LIEROP, Diederik; DE JONG, Boudewijn et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7208, issn 0277-786X, isbn 978-0-8194-7454-4 0-8194-7454-1, 1Vol, 72080R.1-72080R.13Conference Paper

An integrated LC-ESI chip with electrochemical-based gradient generationJUN XIE; SHIH, Jason; QING HE et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 334-337, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Microfabrication of 3-dimensional photoresist structures using selective patterning and development on two types of specific resists and its application to microfluidic componentsYUN, Kwang-Seok; YOON, Euisik.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 757-760, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Experimental study of roof filling rate during thermal bonding of polymer microchannel sealingXUDI WANG; JINGJING LU; YUN JIANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7159, issn 0277-786X, isbn 978-0-8194-7403-2 0-8194-7403-7, 71590M.1-71590M.6Conference Paper

Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high resolution laser projectorsHSU, Shu-Ting; KLOSE, Thomas; DRABE, Christian et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 688703.1-688703.13, issn 0277-786X, isbn 978-0-8194-7062-1Conference Paper

MEMS/MOEMS technologies and applications III (12-14 November 2007, Beijing, China)Chiao, Jung-Chih.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-7011-9, 1 v. (various pagings), isbn 978-0-8194-7011-9Conference Proceedings

Pinched flow fractionation (PFF) for continuous particle separation in a microfluidic deviceNAKASHIMA, M; YAMADA, M; SEKI, M et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 33-36, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

High-cycle fatigue damage evaluation for micro-nanoscale single crystal silicon under bending and tensile stressingNAMAZU, Takahiro; ISONO, Yoshitada.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 149-152, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Bubble-free priming of blind channelsSTEINERT, C. P; SANDMAIER, H; DAUB, M et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 224-228, isbn 0-7803-8265-X, 1Vol, 5 p.Conference Paper

PCR-slide : A modular and cascadable platform for DNA sample processing with integrated nanolitre dosageKAACK, R. M; JUNG, A; WENZ, H. M et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 338-342, isbn 0-7803-8265-X, 1Vol, 5 p.Conference Paper

Fabrication of directed nano wire networks through self-assemblyALACA, Erdem; SEHITOGLU, Huseyin; SAIF, Taher et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 415-417, isbn 0-7803-8265-X, 1Vol, 3 p.Conference Paper

DTIP 2010 (design, test, integration and packaging of MEMS/MOEMS)Courtois, Bernard; Karam, Jean Michel; Maeda, Ryutaro et al.Symposium on design, test, integration and packaging of MEMS/MOEMS. 2010, isbn 978-2-35500-011-9, 1Vol, XIV-416 p, isbn 978-2-35500-011-9Conference Proceedings

MOEMS and miniaturized systems IX (25-27 January 2010, San Francisco, California, United States)Schenk, Harald; Wibool Piyawattanametha.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7594, issn 0277-786X, isbn 978-0-8194-7990-7 0-8194-7990-X, 1Vol, various pagings, isbn 978-0-8194-7990-7 0-8194-7990-XConference Proceedings

MEMS/NEMS technology and applications (2008 International Conference on Optical Instruments and Technology )Zhou, Zhaoying.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7159, issn 0277-786X, isbn 978-0-8194-7403-2 0-8194-7403-7, 1 vol, isbn 978-0-8194-7403-2 0-8194-7403-7Conference Proceedings

Texas Instruments' DLP products massively paralleled MOEMS arrays for display applications : A distant second to Mother NatureODEN, P. I.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 6959, pp 69590D.1-69590D.7, issn 0277-786X, isbn 978-0-8194-7150-5 0-8194-7150-XConference Paper