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Silicon nitride and silicon dioxide thin insulating films VII (Paris, 28 April - 2 May 2003)Sah, R.E; Deen, M.J; Landheer, D et al.Proceedings - Electrochemical Society. 2003, issn 0161-6374, isbn 1-56677-347-4, XII, 636 p, isbn 1-56677-347-4Conference Proceedings
