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ULSI process integration III (Paris, 28 April - 2 May 2003)Claeys, C.L; Gonzales, F; Murota, J et al.Proceedings - Electrochemical Society. 2003, issn 0161-6374, isbn 1-56677-376-8, XVII, 598 p, isbn 1-56677-376-8Conference Proceedings
