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Results 1 to 25 of 2106

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3D Magnetic Field Sensor Concept for Use in Inertial Measurement Units (IMUs)ETTELT, Dirk; REY, Patrice; JOURDAN, Guillaume et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 324-333, issn 1057-7157, 10 p.Article

A Complementary Dual-Contact MEMS Switch Using a Zipping TechniqueSONG, Yong-Ha; KIM, Min-Wu; SEO, Min-Ho et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 710-718, issn 1057-7157, 9 p.Article

A Dynamic Calibration Method for Pirani Gauges Embedded in Fluidic NetworksAN, Seungdo; GIANCHANDANI, Yogesh B.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 699-709, issn 1057-7157, 11 p.Article

Bulk-Aluminum Microfabrication for Micro Fuel CellsSCOTTI, Gianmario; KANNINEN, Petri; KALLIO, Tanja et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 372-379, issn 1057-7157, 8 p.Article

Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical PickupPEI LI; LONG FA PAN; ZAPPE, Hans et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 1, pp 128-136, issn 1057-7157, 9 p.Article

Design and Characterization of Micro Thermoelectric Cross-Plane Generators With Electroplated Bi2Te3, SbxTey, and Reflow SolderingROTH, Reinhard; ROSTEK, Raimar; COBRY, Keith et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 961-971, issn 1057-7157, 11 p.Article

Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency ApplicationsMENGDI HAN; QUAN YUAN; XUMING SUN et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 1, pp 204-212, issn 1057-7157, 9 p.Article

Estimating Damping in Microresonators by Measuring Thermomechanical Noise Using Laser Doppler VibrometryKUTER-AMEBECK, Ottoleo; LABUDA, Aleksander; JOSHI, Surabhi et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 592-599, issn 1057-7157, 8 p.Article

High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device PerformanceETHEM ERKAN AKTAKKA; PETERSON, Rebecca L; NAJAFI, Khalil et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 438-451, issn 1057-7157, 14 p.Article

Infrared Absorption Properties of Carbon Nanotube/Nanodiamond Based Thin Film CoatingsGOKHALE, Vikrant Jayant; SHENDEROVA, Olga A; MCGUIRE, Gary E et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 1, pp 191-197, issn 1057-7157, 7 p.Article

Mechanical Response of Silicon MEMS Diaphragms to Applied PressureSUNDARAM, Paul A; JEAN, Daniel L; SPARKS, Earle M et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 356-363, issn 1057-7157, 8 p.Article

Micro Blood Pressure Energy Harvester for Intracardiac PacemakerDETERRE, Martin; LEFEUVRE, Elie; YANAN ZHU et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 651-660, issn 1057-7157, 10 p.Article

Modeling Electrochemical Etching of Proton Irradiated p-GaAs for the Design of MEMS Building BlocksKOPPE, Tristan; ROTHFUCHS, Charlotte; SCHULTE-BORCHERS, Martina et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 955-960, issn 1057-7157, 6 p.Article

Modeling, Simulation, and Performance Evaluation of a Novel Microfluidic Impedance Cytometer for Morphology-Based Cell DiscriminationCASELLI, Federica; SHAKER, Marjan; COLELLA, Ludovica et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 785-794, issn 1057-7157, 10 p.Article

Super Hydrophobic Parylene-C Produced by Consecutive O2 and SF6 Plasma TreatmentXIAOPENG BI; BRIAN PARK CRUM; WEN LI et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 628-635, issn 1057-7157, 8 p.Article

Tailoring Anchor Etching Profiles During MEMS Release Using Microfluidic Sheathed FlowCHEAH, Ben C; DELL, John M; KEATING, Adrian J et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 918-926, issn 1057-7157, 9 p.Article

100 kHz MEMS Vibratory GyroscopeLIEWALD, Jan-Timo; KUHLMANN, Burkhard; BALSLINK, Thorsten et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1115-1125, issn 1057-7157, 11 p.Article

A Gap-Closing Electrostatic Actuator With a Linear Extended RangeSHMULEVICH, Shai; RIVLIN, Ben; HOTZEN, Inbar et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1109-1114, issn 1057-7157, 6 p.Article

A MEMS Bistable Device With Push-On―Push-Off CapabilityHUANG, Hen-Wei; YANG, Yao-Joe.Journal of microelectromechanical systems. 2013, Vol 22, Num 1, pp 7-9, issn 1057-7157, 3 p.Article

A Single-Platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator With Hardware Description LanguageKONISHI, Toshifumi; MACHIDA, Katsuyuki; MARUYAMA, Satoshi et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 3, pp 755-767, issn 1057-7157, 13 p.Article

A Universal Electrode Approach for Automated Electrochemical Molecular AnalysesLAI YI SIN, Mandy; GAU, Vincent; LIAO, Joseph C et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1126-1132, issn 1057-7157, 7 p.Article

Electrical Admittance Spectroscopy for Piezoelectric MEMSKIM, Donghwan; HEWA-KASAKARAGE, Nishshanka N; YOON, Sang H et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 2, pp 295-302, issn 1057-7157, 8 p.Article

Extending and Tuning the Travel Range of Microelectromechanical Actuators Using Electrically Reconfigurable Nano-Structured ElectrodesJAIN, Ankit; MUHAMMAD ASHRAFUL ALAM.Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1001-1003, issn 1057-7157, 3 p.Article

Fabrication of Optically Transparent PDMS Artificial Lotus Leaf Film Using Underexposed and Underbaked Photoresist MoldYOUNGSAM YOON; LEE, Dong-Weon; LEE, Jeong-Bong et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1073-1080, issn 1057-7157, 8 p.Article

Fabrication of a Microscale Device for Detection of Nitroaromatic CompoundsPETRUCZOK, Christy D; CHOI, Hyungryul J; SE YOUNG YANG et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 1, pp 54-61, issn 1057-7157, 8 p.Article

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