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Metrology, inspection, and process control for microlithography XXIII (23-26 February 2009, San Jose, California, United States)Allgair, John Alexander; Raymond, Christopher J.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 2 vol, 2, isbn 978-0-8194-7525-1 0-8194-7525-4Conference Proceedings

New Packaging Concepts for highly stable Laser Diode ModulesWEMER, Ekkehard; KRETZSCHMAR, Sabine; BONATI, Guido et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7202, issn 0277-786X, isbn 978-0-8194-7448-3, 720204.1-720204.10Conference Paper

MOSAIC: a new wavefront metrologyANDERSON, Christopher N; NAULLEAU, Patrick P.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72720B.1-72720B.7, 2Conference Paper

Special Issue on Laser Ablation: Optics and Selective DiagnosticsHESS, W; RODE, A; ZORBA, V et al.Applied physics. A, Materials science & processing (Print). 2013, Vol 112, Num 1, issn 0947-8396, 227 p.Serial Issue

Special Issue on Laser Ablation: Mechanisms, Models and ExperimentsGARCIA, M; ZERGIOTI, I; ZHIGILEI, L et al.Applied physics. A, Materials science & processing (Print). 2013, Vol 110, Num 3, issn 0947-8396, 224 p.Serial Issue

A study on laser weldability and formability of high thickness ratio tailor welded blanksGUANGWEI WANG; GUOHUA LI; YAN CAI et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 682509.1-682509.7, issn 0277-786X, isbn 978-0-8194-7000-3, 1VolConference Paper

Saw + LMJ : A hybrid semiconductor dicing solutionRICHERZHAGEN, Bemold; PLANKENSTEINER, Martin; KLING, Notker U et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 688005.1-688005.6, issn 0277-786X, isbn 978-0-8194-7055-3Conference Paper

Combined laser texturing and molecular vapour deposition for wetting angle controlJENSEN, Martin F; VESTENTOFT, Kasper; HAUGSHOJ, Kenneth B et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 645906.1-645906.9, issn 0277-786X, isbn 978-0-8194-6572-6, 1VolConference Paper

Confined plasma ablation for shock physics, plate launch and material dynamicsPAISLEY, Dennis L.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 62611Y.1-62611Y.6Conference Paper

Special Issue on Laser Ablation: Creation of Nanomaterials and Pulsed Laser Deposition PLDESCOBAR-ALARCON, L; NIINO, H; ZHU, X et al.Applied physics. A, Materials science & processing (Print). 2013, Vol 110, Num 4, issn 0947-8396, 227 p.Serial Issue

Ad-hoc design of temporally shaped fs laser pulses based on plasma dynamics for deep ablation in fused silicaHERNANDEZ-RUEDA, J; SIEGEL, J; PUERTO, D et al.Applied physics. A, Materials science & processing (Print). 2013, Vol 112, Num 1, pp 185-189, issn 0947-8396, 5 p.Article

Laser Cutting for Slotted Oil PipesHE CHANGYU.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 6722, pp 672240.1-672240.7, issn 0277-786X, isbn 978-0-8194-6879-6 0-8194-6879-7, 2Conference Paper

VUV and UV excilamps and their applicationsTARASENKO, Victor F; SOSNIN, Edward A.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 626136.1-626136.10Conference Paper

Laser modification of structure and properties of glass-ceramicsVEIKO, V. P; KIEU, Q. K; NIKONOROV, N. V et al.SPIE proceedings series. 2004, pp 250-257, isbn 0-8194-5247-5, 8 p.Conference Paper

Laser generated TiC reinforced with Fe-Al matrix composite layer on Al-Si alloyVISWANATHAN, A; SASTIKUMAR, D; KUMAR, Harish et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66660R.1-66660R.10, issn 0277-786X, isbn 978-0-8194-6814-7Conference Paper

Laser engraving of paper and polymeric materials for tactile detectionRAMOS-DE-CAMPOS, Jose A; GAMO, Javier; SORIANO, Carlos et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7131, issn 0277-786X, isbn 978-0-8194-7365-3 0-8194-7365-0, 71311T.1-71311T.8Conference Paper

New Inspection Technology for Hole Pattern by Fourier Space on hp 4x-nm GenerationKAWAI, Akitoshi; HAYANO, Fuminori; ENDO, Kazumasa et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 727219.1-727219.8, 2Conference Paper

Development of a Novel Methodology for Effective Partial die Inspection and MonitoringLEE, Byoung-Ho; LEE, Tae-Yong; CROSS, Andrew et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72723K.1-72723K.6, 2Conference Paper

Combustion-augmented laser ramjetsHORISAWA, Hideyuki; TAMADA, Kazunobu; KIMURA, Itsuro et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 62612M.1-62612M.10Conference Paper

Pulsed femtosecond laser-target momentum coupling in the high-intensity regimeHAMMERLING, P; REMO, J. L.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 62612L.1-62612L.14Conference Paper

Novel laser technologies for crystalline silicon solar cell productionGROHE, Andreas; KNORZ, Annerose; NEKARDA, Jan et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7202, issn 0277-786X, isbn 978-0-8194-7448-3, 72020P.1-72020P.12Conference Paper

Hybrid micro-optical system integration by laserbeam solderingBECKERT, Erik; EBERHARDT, Ramona; BANSE, Henrik et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 645904.1-645904.8, issn 0277-786X, isbn 978-0-8194-6572-6, 1VolConference Paper

Laser propulsion of microelectronic components : releasing mechanism investigationKARLITSKAYA, Natallia S; MEIJER, Johan; DE LANGE, Dirk F et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6326-4, 2Vol, vol2, 62612P.1-62612P.10Conference Paper

Micro ID marking for semiconductor chips: recent progress and future prospectsKOKUSHI, Yoshiaki; SAITOU, Yoshinori; MORI, Akira et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7202, issn 0277-786X, isbn 978-0-8194-7448-3, 72020N.1-72020N.9Conference Paper

Pulse laser welding of aluminum alloy by combined radiationFEDIN, Alexander V; CHASCHIN, Yevgeny A; SHILOV, Igor V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 67350X.1-67350X.6, issn 0277-786X, isbn 978-0-8194-6893-2Conference Paper

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