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Recollections of fifty years with splutteringSIGMUND, Peter.Thin solid films. 2012, Vol 520, Num 19, pp 6031-6049, issn 0040-6090, 19 p.Article

Upgrading the Berg-model for reactive sputtering processesBERG, S; SÄRHAMMAR, E; NYBERG, T et al.Thin solid films. 2014, Vol 565, pp 186-192, issn 0040-6090, 7 p.Article

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