Carbon nanomembranes from self-assembled monolayers: Functional surfaces without bulkTURCHANIN, Andrey; GÖLZHÄUSER, Armin.Progress in surface science. 2012, Vol 87, Num 5-8, pp 108-162, issn 0079-6816, 55 p.Article

Photonic quantum dots based on Bragg reflectors grown by conformal deposition on patterned substratesSAN CHEN; BO QIAN; KUNJI CHEN et al.Applied surface science. 2008, Vol 254, Num 13, pp 4211-4215, issn 0169-4332, 5 p.Article

A history of resolution enhancement technologySCHELLENBERG, Franklin M.Optical review. 2005, Vol 12, Num 2, pp 83-89, issn 1340-6000, 7 p.Conference Paper

Arsenic sulphide glasses as novel photoresist materialsRUSSO, L; VICEK, M; JAIN, H et al.Glass technology. 2005, Vol 46, Num 2, pp 94-98, issn 0017-1050, 5 p.Conference Paper

Patterning colloidal suspensions by selective wetting of microcontact-printed surfacesHEULE, Martin; SCHÖNHOLZER, Urs P; GAUCKLER, Ludwig J et al.Journal of the European Ceramic Society. 2004, Vol 24, Num 9, pp 2733-2739, issn 0955-2219, 7 p.Article

Template-induced growth of close-packed and non-close-packed colloidal crystals during solvent evaporationHOOGENBOOM, J. P; RETIF, C; DE BRES, E et al.Nano letters (Print). 2004, Vol 4, Num 2, pp 205-208, issn 1530-6984, 4 p.Article

Ultrathin polymer Langmuir-Blodgett films for microlithographyTIESHENG LI; MITSUISHI, Masaya; MIYASHITA, Tokuji et al.Thin solid films. 2004, Vol 446, Num 1, pp 138-142, issn 0040-6090, 5 p.Article

Liquid-jet laser-plasma extreme ultraviolet sources: from droplets to filaments : Special cluster on extreme ultraviolet light sources for semiconductor manufacturingHANSSON, Björn A. M; HERTZ, Hans M.Journal of physics. D, Applied physics (Print). 2004, Vol 37, Num 23, pp 3233-3243, issn 0022-3727, 11 p.Article

Novel process for realization of multiple axis actuators suitable for the realization of an ontical switchDEL SARTO, Marco; SASSOLINI, Simone; MARCHI, Mauro et al.SPIE proceedings series. 2004, pp 65-73, isbn 0-8194-5250-5, 9 p.Conference Paper

Deep Reactive Ion Etch conditioning recipeWASILIK, Matthew; NING CHEN.SPIE proceedings series. 2004, pp 103-110, isbn 0-8194-5250-5, 8 p.Conference Paper

Fabrication of large area X-ray masks for UDXRL on beryllium using thin film UV lithography and X-ray backside exposureKOUBA, Josef; LING, Zhong-Geng; LIN WANG et al.SPIE proceedings series. 2004, pp 173-181, isbn 0-8194-5250-5, 9 p.Conference Paper

Creation of the conducting polymer composites based on silicon with relay effectANELI, Jimsher N; RUSIASHVILI, Giorgi O.SPIE proceedings series. 2004, pp 269-274, isbn 0-8194-5250-5, 6 p.Conference Paper

Realization of vertical P⁺ wall through-waferSANCHEZ, J-L; SCHEID, E; AUSTIN, P et al.SPIE proceedings series. 2004, pp 119-127, isbn 0-8194-5250-5, 9 p.Conference Paper

Wall shear stress and pressure sensors development for active control of flowTSAMADOS, Dimitrios M; MEUNIER, Delphine; LAGHROUCHE, Mourad et al.SPIE proceedings series. 2004, pp 250-259, isbn 0-8194-5250-5, 10 p.Conference Paper

A microfabricated suspended-tube chemical reactor for thermally efficient fuel processingARANA, Leonel R; SCHAEVITZ, Samuel B; FRANZ, Aleksander J et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 5, pp 600-612, issn 1057-7157, 13 p.Article

Building thick photoresist structures from the bottom upPETERMAN, Mark C; HUIE, Philip; BLOOM, D. M et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 3, pp 380-382, issn 0960-1317, 3 p.Article

The stability of ink-jet printed lines of liquid with zero receding contact angle on a homogeneous substrateDUINEVELD, P. C.Journal of Fluid Mechanics. 2003, Vol 477, pp 175-200, issn 0022-1120, 26 p.Article

Development and characterization of surface micromachined, out-of-plane hot-wire anemometerCHEN, Jack; CHANG LIU.Journal of microelectromechanical systems. 2003, Vol 12, Num 6, pp 979-988, issn 1057-7157, 10 p.Article

Electrolyte-based on-demand and disposable microbatteryKI BANG LEE; LIWEI LIN.Journal of microelectromechanical systems. 2003, Vol 12, Num 6, pp 840-847, issn 1057-7157, 8 p.Article

Fabrication of on-chip microcapillary using photosensitive glassETOH, S; FUJIMURA, T; HATTORI, R et al.Microsystem technologies. 2003, Vol 9, Num 8, pp 541-545, issn 0946-7076, 5 p.Article

New low-stress PECVD poly-sige layers for MEMSRUSU, Cristina; SEDKY, Sherif; KRONMÜLLER, Silvia et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 6, pp 816-825, issn 1057-7157, 10 p.Article

Inductively coupled plasma etching of HgCdTeSMITH, E. P. G; GLEASON, J. K; PHAM, L. T et al.Journal of electronic materials. 2003, Vol 32, Num 7, pp 816-820, issn 0361-5235, 5 p.Conference Paper

Deep X-ray mask with integrated actuator for 3D microfabricationLEE, Kwang-Cheol; LEE, Seung S.Sensors and actuators. A, Physical. 2003, Vol 108, Num 1-3, pp 121-127, issn 0924-4247, 7 p.Conference Paper

Advanced sacrificial poly-Si technology for fluidic systemsBERENSCHOT, J. W; TAS, N. R; LAMMERINK, T. S. J et al.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 621-624, issn 0960-1317Article

Fabrication of star grooves and rhombus grooves micro heat pipeKANG, Shung-Wen; HUANG, Derlin.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 525-531, issn 0960-1317Article