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Results 1 to 25 of 1471

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Ion beam nanoscale fabrication and lithography—A reviewBAGLIN, J. E. E.Applied surface science. 2012, Vol 258, Num 9, pp 4103-4111, issn 0169-4332, 9 p.Article

Investigation into defects occurring on the polymer surface during the photolithography processBOSC, D; MAALOUF, A; HAESAERT, S et al.Applied surface science. 2007, Vol 253, Num 14, pp 6162-6164, issn 0169-4332, 3 p.Article

Spatially defined silver mirror reaction on a micropattemed aldehyde-terminated self-assembled monolayerHOZUMI, Atsushi; INAGAKI, Masahiko; SHIRAHATA, Naoto et al.Applied surface science. 2006, Vol 252, Num 18, pp 6111-6114, issn 0169-4332, 4 p.Conference Paper

Generalized linear stability of noninertial coating flows over topographical featuresDAVIS, Jeffrey M; TROIAN, Sandra M.Physics of fluids (1994). 2005, Vol 17, Num 7, pp 072103.1-072103.9, issn 1070-6631Article

Metrological applications of mueller polarimetry in conical diffraction for overlay characterization in microelectronicsNOVIKUVA, T; DE MARTINO, A; OSSIKOVSKI, R et al.EPJ. Applied physics (Print). 2005, Vol 31, Num 1, pp 63-69, issn 1286-0042, 7 p.Article

X-ray micromachining SU-8 resist for a terahertz photonic filterSHEW, Bor-Yuan; LI, Han-Chieh; PAN, Ci-Ling et al.Journal of physics. D, Applied physics (Print). 2005, Vol 38, Num 7, pp 1097-1103, issn 0022-3727, 7 p.Article

Estimating thermal transport in deep X-ray lithography with an inversion methodCHANG, W.-J; YANG, Y.-C; LIN, C.-M et al.Applied physics. B, Lasers and optics (Print). 2005, Vol 81, Num 4, pp 543-548, issn 0946-2171, 6 p.Article

BioMEMS and nanotechnology (Perth, 10-12 December 2003)Nicolau, Dan V; Muller, Uwe R; Dell, John M et al.SPIE proceedings series. 2004, isbn 0-8194-5168-1, XLIV, 392 p, isbn 0-8194-5168-1Conference Proceedings

Phase transition vs. thickness in stress-induced curvature on Cr/Au MEMS mirror layersILIC, A; GOOSSEN, K. W.SPIE proceedings series. 2004, pp 19-25, isbn 0-8194-5250-5, 7 p.Conference Paper

High performance thick copper inductors in an RF technologyVAED, Kunal; GRAHAM, William; STEEN, Michelle et al.SPIE proceedings series. 2004, pp 74-85, isbn 0-8194-5250-5, 12 p.Conference Paper

Direct-write waveguides and structural modification by femtosecond laser pulsesPIN YANG; BURNS, George R; TALLANT, Dave R et al.SPIE proceedings series. 2004, pp 146-155, isbn 0-8194-5250-5, 10 p.Conference Paper

Silicon carbide micro- and nanoelectromechanical systemsMEHREGANY, Mehran; ZORMAN, Christian A.SPIE proceedings series. 2004, pp 1-7, isbn 0-8194-5250-5, 7 p.Conference Paper

A novel tank for DI water reduction in MEMS manufacturingRACCURT, O; TARDIF, F; KERBER, L et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 3, pp 442-446, issn 0960-1317, 5 p.Article

Design and characterization of inertia-activated electrical micro-switches fabricated and packaged using low-temperature photoresist molded metal-electroplating technologyWEI MA; ZOHAR, Yitshak; MAN WONG et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 6, pp 892-899, issn 0960-1317, 8 p.Article

Electronically controllable microvalves based on smart hydrogels: Magnitudes and potential applicationsRICHTER, Andreas; KUCKLING, Dirk; HOWITZ, Steffen et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 5, pp 748-753, issn 1057-7157, 6 p.Article

Micromirror array for protein micro array fabricationLEE, Kook-Nyung; SHIN, Dong-Sik; LEE, Yoon-Sik et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 3, pp 474-481, issn 0960-1317, 8 p.Article

Nanopatterning of a silicon surface by near-field enhanced laser irradiationLU, Y; CHEN, S. C.Nanotechnology (Bristol. Print). 2003, Vol 14, Num 5, pp 505-508, issn 0957-4484, 4 p.Article

One-, two- and three-dimensional nanostructures with atom lithographyOBERTHALER, Markus K; PFAU, Tilman.Journal of physics. Condensed matter (Print). 2003, Vol 15, Num 6, pp R233-R255, issn 0953-8984Article

Proton-exchanged wet etching of recessed-structure SAW filterTSAI, Shih-Hung; WANG, Na-Fu; HOUNG, Mau-Phon et al.IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2003, Vol 50, Num 9, pp 1219-1222, issn 0885-3010, 4 p.Article

Tapered LIGA HARMsTURNER, Ryan; DESTA, Yohannes; KELLY, Kevin et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 3, pp 367-372, issn 0960-1317, 6 p.Article

The process modelling of epoxy dispensing for microchip encapsulation using fuzzy linear regression with fuzzy intervalsIP, C. K. W; KWONG, C. K; BAI, H et al.International journal, advanced manufacturing technology. 2003, Vol 22, Num 5-6, pp 417-423, issn 0268-3768, 7 p.Article

Electroplating moulds using dry film thick negative photoresistKUKHARENKA, E; FAROOQUI, M. M; GRIGORE, L et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 4, pp S67-S74, issn 0960-1317Conference Paper

High rate sapphire (Al2O3) etching in inductively coupled plasmas using axial external magnetic fieldKIM, D. W; JEONG, C. H; KIM, K. N et al.Thin solid films. 2003, Vol 435, Num 1-2, pp 242-246, issn 0040-6090, 5 p.Conference Paper

Fabrication of alloy and ceramic microstructures by LIGA-MA-SPS processMIYANO, Naoki; TAGAYA, Kazunori; KAWASE, Kazunori et al.Sensors and actuators. A, Physical. 2003, Vol 108, Num 1-3, pp 250-257, issn 0924-4247, 8 p.Conference Paper

Layer-by-layer nanoassembly of polyion and enzymes for production of micropatterns and nanoshellsLVOV, Y; CUI, T; HUA, F et al.SPIE proceedings series. 2003, pp 132-139, isbn 0-8194-4860-5, 8 p.Conference Paper

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