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Optical metrology and inspection for industrial applications (18-20 October 2010, Beijing, China)Harding, Kevin; Huang, Peisen S; Yoshizawa, Toru et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7855, issn 0277-786X, isbn 978-0-8194-8385-0, 1 vol, isbn 978-0-8194-8385-0Conference Proceedings

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