au.\*:("BAKER, Michael S")
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Robust design and model validation of nonlinear compliant micromechanismsWITTWER, Jonathan W; BAKER, Michael S; HOWELL, Larry L et al.Journal of microelectromechanical systems. 2006, Vol 15, Num 1, pp 33-41, issn 1057-7157, 9 p.Article
Compact On-Chip Microtensile Tester With Prehensile Grip MechanismHAZRA, Siddharth S; BAKER, Michael S; BEUTH, Jack L et al.Journal of microelectromechanical systems. 2011, Vol 20, Num 4, pp 1043-1053, issn 1057-7157, 11 p.Article
Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed-fixed beamsBAKER, Michael S; DE BOER, Maarten P; SMITH, Norman F et al.Journal of microelectromechanical systems. 2002, Vol 11, Num 6, pp 743-753, issn 1057-7157, 11 p.Article
Modeling and Measurement of a Bistable Beam in a Microelectromechanical SystemBRAKE, Matthew R; BAKER, Michael S; MOORE, Nathan W et al.Journal of microelectromechanical systems. 2010, Vol 19, Num 6, pp 1503-1514, issn 1057-7157, 12 p.Article
Spatially resolved temperature mapping of electrothermal actuators by surface raman scatteringKEAMEY, Sean P; PHINNEY, Leslie M; BAKER, Michael S et al.Journal of microelectromechanical systems. 2006, Vol 15, Num 2, pp 314-321, issn 1057-7157, 8 p.Article
Electrothermal actuator reliability studiesPLASS, Richard; BAKER, Michael S; WALRAVEN, Jeremy A et al.SPIE proceedings series. 2004, pp 15-21, isbn 0-8194-5251-3, 7 p.Conference Paper
Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant ApplicationsANAND, Sindhu; SUTANTO, Jemmy; BAKER, Michael S et al.Journal of microelectromechanical systems. 2012, Vol 21, Num 5, pp 1172-1186, issn 1057-7157, 15 p.Article
Active MEMS Valves for Flow Control in a High-Pressure Micro-Gas-AnalyzerGALAMBOS, Paul; LANTZ, Jeffrey; BAKER, Michael S et al.Journal of microelectromechanical systems. 2011, Vol 20, Num 5, pp 1150-1162, issn 1057-7157, 13 p.Article
On-chip laboratory suite for testing of free-standing metal film mechanical properties, Part II -ExperimentsDE BOER, Maarten P; CORWIN, Alex D; KOTULA, Paul G et al.Acta materialia. 2008, Vol 56, Num 14, pp 3313-3326, issn 1359-6454, 14 p.Article