au.\*:("BERNACKI SE")
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DUAL-POLARITY, SINGLE-RESIST MIXED (E-BEAM/PHOTO) LITHOGRAPHYBERKER TD; BERNACKI SE.1981; ELECTRON DEVICE LETT.; ISSN 0193-8576; USA; DA. 1981; VOL. 2; NO 11; PP. 281-283; BIBL. 3 REF.Article
PROSPECTS FOR X-RAY FABRICATION OF SI IC DEVICES.SMITH HI; BERNACKI SE.1975; J. VACUUM SCI. TECHNOL.; U.S.A.; DA. 1975; VOL. 12; NO 6; PP. 1321-1323; BIBL. 19 REF.; (SYMP. ELECTRON ION PHOTON BEAM TECHNOL. 13. PROC.; COLORADO SPRINGS; 1975)Conference Paper
