kw.\*:("Bidirectional ellipsometry")
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Nanoscale surface roughness characterization by full field polarized light-scatteringLIU, Cheng-Yang; FU, Wei-En; LIN, Tzeng-Yow et al.Optics and lasers in engineering. 2011, Vol 49, Num 1, pp 145-151, issn 0143-8166, 7 p.Article
Polarized angular dependence of out-of-plane light-scattering measurements for nanoparticles on waferLIU, Cheng-Yang; FU, Wei-En.Optics communications. 2009, Vol 282, Num 11, pp 2097-2103, issn 0030-4018, 7 p.Article