A parametric study on surface roughness evaluation of semi-conductor wafers by laser scatteringCHO JUI TAY; QUAN, Chenggen.Optik (Stuttgart). 2003, Vol 114, Num 1, pp 1-6, issn 0030-4026, 6 p.Article

Carrier phase component removal : a generalized least-squares approachLUJIE CHEN; CHO JUI TAY.Journal of the Optical Society of America. A, Optics, image science, and vision (Print). 2006, Vol 23, Num 2, pp 435-443, issn 1084-7529, 9 p.Article

Modified Rayleigh criterion for 90 nm lithography technologies and belowGEK SOON CHUA; CHO JUI TAY; CHENGGEN QUAN et al.Microelectronic engineering. 2004, Vol 71, Num 2, pp 139-149, issn 0167-9317, 11 p.Article

Performance improvement in gate level lithography using resolution enhancement techniquesGEK SOON CHUA; CHO JUI TAY; CHENGGEN QUAN et al.Microelectronic engineering. 2004, Vol 75, Num 2, pp 155-164, issn 0167-9317, 10 p.Article

Fringe contrast-based 3D profilometry using fringe projectionLUJIE CHEN; CHENGGEN QUAN; CHO JUI TAY et al.Optik (Stuttgart). 2005, Vol 116, Num 3, pp 123-128, issn 0030-4026, 6 p.Article

Shape measurement using one frame projected sawtooth fringe patternLUJIE CHEN; CHENGGEN QUAN; CHO JUI TAY et al.Optics communications. 2005, Vol 246, Num 4-6, pp 275-284, issn 0030-4018, 10 p.Article

Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structuresCHO JUI TAY; QUAN, Chenggen; GOPAL, Mahadevaiah et al.Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 2, issn 0960-1317, 025015.1-025015.9Article

Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppersHUICONG LIU; LEE, Chengkuo; KOBAYASHI, Takeshi et al.Smart materials and structures. 2012, Vol 21, Num 3, issn 0964-1726, 035005.1-035005.12Article

A scrape-through piezoelectric MEMS energy harvester with frequency broadband and up-conversion behaviorsHUICONG LIU; CHO JUI TAY; CHENGGEN QUAN et al.Microsystem technologies. 2011, Vol 17, Num 12, pp 1747-1754, issn 0946-7076, 8 p.Article

A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 HzHUICONG LIU; LEE, Chengkuo; KOBAYASHI, Takeshi et al.Microsystem technologies. 2012, Vol 18, Num 4, pp 497-506, issn 0946-7076, 10 p.Article

Optical image encryption with a bit-plane separation method in phase-shifting digital holographyWEN CHEN; CHENGGEN QUAN; CHO JUI TAY et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7522, issn 0277-786X, isbn 978-0-8194-7912-9, 752222.1-752222.7, 3Conference Paper

Process window optimization of CPL mask for beyond 45nm lithographySOON YOENG TAN; QUNYING LIN; CHO JUI TAY et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 652029.1-652029.12, issn 0277-786X, isbn 978-0-8194-6639-6Conference Paper

The study of Chromeless Phase Lithography (CPL) for 45nm lithographySOON YOENG TAN; QUNYING LIN; CHO JUI TAY et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63492O.1-63492O.11, issn 0277-786X, isbn 0-8194-6444-9, 2VolConference Paper

Circular apertures for contact hole patterning in 193nm immersion lithographyCHO JUI TAY; CHENGGEN QUAN; MOH LUNG LING et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7522, issn 0277-786X, isbn 978-0-8194-7912-9, 752251.1-752251.9, 3Conference Paper

Profiling of an object using a time-frequency analysis method in digital holographic interferometryWEN CHEN; CHENGGEN QUAN; CHO JUI TAY et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7375, issn 0277-786X, isbn 978-0-8194-7651-7 0-8194-7651-X, 73754S.1-73754S.6, 2Conference Paper

Line end shortening and corner rounding for novel off-axis illumination source shapesMOH LUNG LING; GEK SOON CHUA; QUNYING LIN et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7274, issn 0277-786X, isbn 978-0-8194-7527-5 0-8194-7527-0, 72742V.1-72742V.12, 2Conference Paper