Pressure sensor based on a microstructure with dual silicon nitride vibrating beamsDEYONG CHEN; DAFU CUI; LI WANG et al.SPIE proceedings series. 2002, pp 287-295, isbn 0-8194-4730-7, 9 p.Conference Paper

Fabrication of suspended electrokinetic microchannels from directly written sacrificial polymer fibersBERRY, Scott M; ROUSSEL, Thomas J; CAMBRON, Scott D et al.Microfluidics and nanofluidics (Print). 2012, Vol 13, Num 3, pp 451-459, issn 1613-4982, 9 p.Article

Half-coaxial-like transmission line using benzo cyclo butene layerKIM, J.-M; CHEON, C; KWON, Y et al.Electronics Letters. 2008, Vol 44, Num 13, pp 810-811, issn 0013-5194, 2 p.Article

Novel Approaches to Realizing Chemical Lift-off of GaN Epilayer from Sapphire SubstrateHORNG, Ray-Hua; TSAI, Tsung-Yen; YEN, Cheng-Ying et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7954, issn 0277-786X, isbn 978-0-8194-8491-8, 795417.1-795417.8Conference Paper

Self-sacrificial surface micromachining using poly(methyl methacrylate)JOHNSTONE, R. W; FOULDS, I. G; PARAMESWARAN, M et al.Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 11, issn 0960-1317, 115012.1-115012.7Article

Plasma and chemical treatments of polyimide sacrificial layers in processing of microbolometrsBABAEVSKY, Petr G; ZHUKOV, Andrey A; ZHUKOVA, Svetlana A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 282-288, issn 0277-786X, isbn 0-8194-5828-7, 1Vol, 7 p.Conference Paper

Advanced sacrificial poly-Si technology for fluidic systemsBERENSCHOT, J. W; TAS, N. R; LAMMERINK, T. S. J et al.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 621-624, issn 0960-1317Article

Flash release : An alternative for releasing complex MEMS devicesDELADI, S; SVETOVOY, V; KRIJNEN, G. J. M et al.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, pp 343-348, isbn 2-84813-026-1, 6 p.Conference Paper

Smoothing and surface planarization of sacrificial layers in MEMS technologyLUCIBELLO, Andrea; PROIETTI, Emanuela; MARCELLI, Romolo et al.Microsystem technologies. 2013, Vol 19, Num 6, pp 845-851, issn 0946-7076, 7 p.Conference Paper

Fabrication of microchannels using polynorbornene photosensitive sacrificial materialsXIAOQUN WU; REED, Hollie A; YONG WANG et al.Journal of the Electrochemical Society. 2003, Vol 150, Num 9, pp H205-H213, issn 0013-4651Article

SU8-micromechanical structures with in situ fabricated movable partsSEIDEMANN, V; RABE, J; FELDMANN, M et al.Microsystem technologies. 2002, Vol 8, Num 4-5, pp 348-350, issn 0946-7076Conference Paper

A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technologyYI, F; PENG, L; ZHANG, J et al.Microsystem technologies. 2001, Vol 7, Num 3, pp 103-106, issn 0946-7076Article

A New Switching Device for Printed Electronics: Inkjet-Printed Microelectromechanical RelayEUNG SEOK PARK; YENHAO CHEN; KING LIU, Tsu-Jae et al.Nano letters (Print). 2013, Vol 13, Num 11, pp 5355-5360, issn 1530-6984, 6 p.Article

High-throughput anisotropic plasma etching of polyimide for MEMSBLIZNETSOV, Vladimir; MANICKAM, Anbumalar; JUNWEI CHEN et al.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 6, issn 0960-1317, 067003.1-067003.4Article

Evaluation of residual stresses in thin films by critical buckling observation of circular microstructures and finite element methodYU, Yi-Ting; YUAN, Wei-Zheng; QIAO, Da-Yong et al.Thin solid films. 2008, Vol 516, Num 12, pp 4070-4075, issn 0040-6090, 6 p.Article

Free-standing thick-film piezoelectric deviceKOK, S. L; WHITE, N. M; HARRIS, N. R et al.Electronics Letters. 2008, Vol 44, Num 4, pp 280-282, issn 0013-5194, 3 p.Article

General Assembly Method for Linear Metal Nanoparticle Chains Embedded in NanotubesYONG QIN; LIFENG LIU; RENBIN YANG et al.Nano letters (Print). 2008, Vol 8, Num 10, pp 3221-3225, issn 1530-6984, 5 p.Article

M³EDM : MEMS-enabled micro-electro-discharge machiningALLA CHAITANYA, Chakravarty Reddy; TAKAHATA, Kenichi.Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 10, issn 0960-1317, 105009.1-105009.7Article

Surface-micromachined MEMS acoustic sensor with bottom electrode anchorsLEE, J; KIM, H. J; LEE, S. Q et al.Electronics Letters. 2008, Vol 44, Num 9, pp 576-578, issn 0013-5194, 3 p.Article

Sacrificial etching of Al_xGa_1-3xAs for III-V MEMS surface micromachiningKUMAR, P; KANAKARAJU, S; DEVOE, D. L et al.Applied physics. A, Materials science & processing (Print). 2007, Vol 88, Num 4, pp 711-714, issn 0947-8396, 4 p.Article

In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layerLING, Z; LIAN, K.Microsystem technologies. 2007, Vol 13, Num 3-4, pp 253-257, issn 0946-7076, 5 p.Conference Paper

An all-diamond inkjet realized in sacrificial layer technologyMÜLLER, R; GRONMAIER, R; JANISCHOWSKY, K et al.Diamond and related materials. 2005, Vol 14, Num 3-7, pp 504-508, issn 0925-9635, 5 p.Conference Paper

Biaxial initial stress characterization of bilayer gold RF-switchesYACINE, K; FLOURENS, F; PLANA, R et al.Microelectronics and reliability. 2005, Vol 45, Num 9-11, pp 1776-1781, issn 0026-2714, 6 p.Conference Paper

Rendering SU-8 hydrophilic to facilitate use in micro channel fabricationNORDSTRÖM, Maria; MARIE, Rodolphe; CALLEJA, Montserrat et al.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 12, pp 1614-1617, issn 0960-1317, 4 p.Article

A new temperature compensation scheme for a silicon nitride beam resonant pressure sensorDEYONG CHEN; DAFU CUI; ZHENG CUI et al.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, pp 335-338, isbn 2-84813-026-1, 4 p.Conference Paper