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METHODES D'INTERFEROMETRIE INFRAROUGE POUR LA MESURE DES PARAMETRES DES STRUCTURES EPITAXIALES AU SILICIUM AVEC UNE COUCHE CACHEEBANKOVSKIJ YU V; VOLKOVA LV; KOKIN AA et al.1981; MIKROELEKTRONIKA; ISSN 0544-1269; SUN; DA. 1981; VOL. 10; NO 2; PP. 140-145; BIBL. 3 REF.Article

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