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Advanced sacrificial poly-Si technology for fluidic systemsBERENSCHOT, J. W; TAS, N. R; LAMMERINK, T. S. J et al.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 621-624, issn 0960-1317Article

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Flash release : An alternative for releasing complex MEMS devicesDELADI, S; SVETOVOY, V; KRIJNEN, G. J. M et al.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, pp 343-348, isbn 2-84813-026-1, 6 p.Conference Paper

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