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Results 1 to 25 of 439

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Sacrificial layer etching process in joint channelsCHANGJU WU; ZHONGHE JIN; HUILIAN MA et al.Journal of micromechanics and microengineering (Print). 2006, Vol 16, Num 11, pp 2323-2329, issn 0960-1317, 7 p.Article

Pressure sensor based on a microstructure with dual silicon nitride vibrating beamsDEYONG CHEN; DAFU CUI; LI WANG et al.SPIE proceedings series. 2002, pp 287-295, isbn 0-8194-4730-7, 9 p.Conference Paper

Three-dimensional simulation of sacrificial etchingCERVENKA, Johann; CERIC, Hajdin; SELBERHERR, Siegfried et al.Microsystem technologies. 2008, Vol 14, Num 4-5, pp 665-671, issn 0946-7076, 7 p.Conference Paper

Novel Approaches to Realizing Chemical Lift-off of GaN Epilayer from Sapphire SubstrateHORNG, Ray-Hua; TSAI, Tsung-Yen; YEN, Cheng-Ying et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7954, issn 0277-786X, isbn 978-0-8194-8491-8, 795417.1-795417.8Conference Paper

Self-sacrificial surface micromachining using poly(methyl methacrylate)JOHNSTONE, R. W; FOULDS, I. G; PARAMESWARAN, M et al.Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 11, issn 0960-1317, 115012.1-115012.7Article

Plasma and chemical treatments of polyimide sacrificial layers in processing of microbolometrsBABAEVSKY, Petr G; ZHUKOV, Andrey A; ZHUKOVA, Svetlana A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 282-288, issn 0277-786X, isbn 0-8194-5828-7, 1Vol, 7 p.Conference Paper

Advanced sacrificial poly-Si technology for fluidic systemsBERENSCHOT, J. W; TAS, N. R; LAMMERINK, T. S. J et al.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 621-624, issn 0960-1317Article

A new process technique for complementary metal-oxide-semiconductor [CMOS] compatible sensorsSHEEN, Chin-Shown; SIEN CHI.Sensors and materials. 2001, Vol 13, Num 1, pp 57-66, issn 0914-4935Article

Surface micromachining technology with two SU-8 structural layers and sol-gel, SU-8 or SiO2/sol-gel sacrificial layersCONEDERA, V; SALVAGNAC, L; FABRE, N et al.Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 8, issn 0960-1317, N52-N57Article

Preparation of ultrathin self-standing polyelectrolyte multilayer membranes at physiological conditions using ph-responsive film segments as sacrificial layersSUGIYAMA ONO, Shoko; DECHER, Gero.Nano letters (Print). 2006, Vol 6, Num 4, pp 592-598, issn 1530-6984, 7 p.Article

Sacrificial polymers for nanofluidic channels in biological applicationsLI, Wanli; TEGENFELDT, Jonas O; LEI CHEN et al.Nanotechnology (Bristol. Print). 2003, Vol 14, Num 6, pp 578-583, issn 0957-4484, 6 p.Article

Fabrication of suspended electrokinetic microchannels from directly written sacrificial polymer fibersBERRY, Scott M; ROUSSEL, Thomas J; CAMBRON, Scott D et al.Microfluidics and nanofluidics (Print). 2012, Vol 13, Num 3, pp 451-459, issn 1613-4982, 9 p.Article

Half-coaxial-like transmission line using benzo cyclo butene layerKIM, J.-M; CHEON, C; KWON, Y et al.Electronics Letters. 2008, Vol 44, Num 13, pp 810-811, issn 0013-5194, 2 p.Article

Direct nanometer scale patterning of SiO2 with electron beam irradiation through a sacrificial layerALLEE, D. R; BROERS, A. N.Applied physics letters. 1990, Vol 57, Num 21, pp 2271-2273, issn 0003-6951Article

Flash release : An alternative for releasing complex MEMS devicesDELADI, S; SVETOVOY, V; KRIJNEN, G. J. M et al.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, pp 343-348, isbn 2-84813-026-1, 6 p.Conference Paper

Photo-definable microchannels made with spin-on polymers and short sacrificial etch timesCARRON, Christopher J; PHILLIPS, Mallory; PHILLIPS, Brian S et al.Microfluidics and nanofluidics (Print). 2009, Vol 7, Num 2, pp 283-289, issn 1613-4982, 7 p.Article

Isotropic etching of SiGe alloys with high selectivity to similar materialsBOREL, S; ARVET, C; BILDE, J et al.Microelectronic engineering. 2004, Vol 73-74, pp 301-305, issn 0167-9317, 5 p.Conference Paper

Release and surface-passivation techniques of stiction-free ndcromachined structuresHARIZ, Alex J.SPIE proceedings series. 2002, pp 272-278, isbn 0-8194-4730-7, 7 p.Conference Paper

Smoothing and surface planarization of sacrificial layers in MEMS technologyLUCIBELLO, Andrea; PROIETTI, Emanuela; MARCELLI, Romolo et al.Microsystem technologies. 2013, Vol 19, Num 6, pp 845-851, issn 0946-7076, 7 p.Conference Paper

Fabrication of microchannels using polynorbornene photosensitive sacrificial materialsXIAOQUN WU; REED, Hollie A; YONG WANG et al.Journal of the Electrochemical Society. 2003, Vol 150, Num 9, pp H205-H213, issn 0013-4651Article

SU8-micromechanical structures with in situ fabricated movable partsSEIDEMANN, V; RABE, J; FELDMANN, M et al.Microsystem technologies. 2002, Vol 8, Num 4-5, pp 348-350, issn 0946-7076Conference Paper

A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technologyYI, F; PENG, L; ZHANG, J et al.Microsystem technologies. 2001, Vol 7, Num 3, pp 103-106, issn 0946-7076Article

Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacementBAO, X. Q; DARGENT, T; CATTAN, E et al.Journal of micromechanics and microengineering (Print). 2010, Vol 20, Num 2, issn 0960-1317, 025005.1-025005.13Article

Fabrication of micro ball joint by using micro-EDM and electroformingLIN, Chang-Sheng; LIAO, Yunn-Shiuan; CHENG, Yi-Ting et al.Microelectronic engineering. 2010, Vol 87, Num 5-8, pp 1475-1478, issn 0167-9317, 4 p.Conference Paper

New release technique of a thick sacrificial layer and residue effects on novel half-coaxial transmission line filtersKIM, Yongsung; LLAMAS-GARRO, Ignacio; BAEK, Chang-Wook et al.Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 5, issn 0960-1317, 055018.1-055018.6Article

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