au.\*:("DECAMS, J. M")
Results 1 to 2 of 2
Selection :
TiO2 anatase films obtained by direct liquid injection atomic layer deposition at low temperatureAVRIL, L; REYMOND-LARUINAZ, S; DECAMS, J. M et al.Applied surface science. 2014, Vol 288, pp 201-207, issn 0169-4332, 7 p.Article
Electrical characterization of HfO2 films obtained by UV assisted injection MOCVDDECAMS, J. M; GUILLON, H; RUSWORTH, S et al.Microelectronics and reliability. 2005, Vol 45, Num 5-6, pp 929-932, issn 0026-2714, 4 p.Conference Paper
