au.\*:("DEMARTEAU, Marcel")
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Tunable Transport Gap in PhosphoreneDAS, Saptarshi; WEI ZHANG; DEMARTEAU, Marcel et al.Nano letters (Print). 2014, Vol 14, Num 10, pp 5733-5739, issn 1530-6984, 7 p.Article
Mask substrate birefringence requirements for hyper-NA lithographyVAN DE KERKHOF, Mark; DE BOEIJ, Wim; DEMARTEAU, Marcel et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6197-0, vol 3, 615444.1-615444.11Conference Paper
The first full-field EUV masks ready for printingMICKAN, Uwe; GROENEVELD, Rogier; DEMARTEAU, Marcel et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 628105.1-628105.10, issn 0277-786X, isbn 0-8194-6356-6, 1VolConference Paper