kw.\*:("DEVELOPPEMENT SEC")
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A DRY DEVELOPMENT MODEL FOR A POSITIVE ELECTRON BEAM RESISTYAMADA M; HATTORI S; MORITA S et al.1982; JOURNAL OF THE ELECTROCHEMICAL SOCIETY; ISSN 0013-4651; USA; DA. 1982; VOL. 129; NO 11; PP. 2598-2602; BIBL. 22 REF.Article
Tone control in dry development of photosensitive polyimidesMUNOZ, J; DOMINGUEZ, C.Vacuum. 1998, Vol 49, Num 1, pp 35-41, issn 0042-207XArticle
