Anisotropy of the piezojunction effect in silicon transistorsCREEMER, J. F; FRENCH, P. J.Proceedings, IEEE micro electro mechanical systems. 2002, pp 316-319, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Combined -Pirani/bending membrane- pressure sensorVAN BAAR, J. J; WIEGERINK, R. J; LAMMERINK, T. S. J et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 328-331, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Six-degree of freedom micro force-moment sensor for application in geophysicsDZUNG VIET DAO; TORIVAMA, Toshivuki; WELLS, John et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 312-315, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Temperature control of CMOS micromachined sensorsLAKDAWALA, Hasnain; FEDDER, Gary K.Proceedings, IEEE micro electro mechanical systems. 2002, pp 324-327, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Magnetic actuation and MOS-transistor sensing for CMOS-integrated resonatorsLANGE, D; HAGLEITNER, C; HERZOG, C et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 304-307, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

LEd-SpEC: Spectroscopic detection of water contaminants using glow discharges from liquid microelectrodesWILSON, Chester G; GIANCHANDANI, Yogesh B.Proceedings, IEEE micro electro mechanical systems. 2002, pp 248-251, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Hybrid mounted micromachined aluminium hot-wire for near-wall turbulence measurementsHAASL, Sjoerd; MUCHA, Dirk; CHERNORAY, Valery et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 336-339, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

A new type of tactile sensor detecting contact force and hardness of an objectSHIMIZU, T; SHIKIDA, M; SATO, K et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 344-347, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

SU-8 based piezoresistive mechanical sensorTHAYSEN, J; YALCINKAYA, A. D; VESTERGAARD, R. K et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 320-323, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2011COURTOIS, Bernard; MICHEL, Bernd.Microsystem technologies. 2012, Vol 18, Num 11, issn 0946-7076, 185 p.Serial Issue

Fiber alignment analysis of a receiver with integrated MEMS VOACHAO WANG; HICKEY, Ryan; IRWIN, Rob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63521Q.1-63521Q.8, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

MEMS / MOEMS technologies and applications II (Beijing, 10-12 November 2004)Zhichun Ma; Guofan Jin; Xuyuan Chen et al.SPIE proceedings series. 2004, isbn 0-8194-5596-2, XI, 364 p, isbn 0-8194-5596-2Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2003 (DTIP 2003)Bergman, Keren.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2003, isbn 0-7803-7066-X, 1Vol, XI-411 p, isbn 0-7803-7066-XConference Proceedings

BioMEMS and smart nanostructures (Adelaide, 17-19 December 2001)Kish, Laszlo B; Harvey, Erol C; Spillman, William B et al.SPIE proceedings series. 2001, isbn 0-8194-4320-4, XI, 362 p, isbn 0-8194-4320-4Conference Proceedings

MEMS microdisplays : overview and marketsBOUCHIUD, Jérémie; WICHT, Henning.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 611406.1-611406.8, issn 0277-786X, isbn 0-8194-6156-3, 1VolConference Paper

MEMS components and applications for industry, automobiles, aerospace and communication II (San Jose CA, 28-29 January 2003)Janson, Siegfried W.SPIE proceedings series. 2003, isbn 0-8194-4781-1, XLIV, 248 p, isbn 0-8194-4781-1Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2004 (DTIP 2004)Courtois, Bernard.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, isbn 2-84813-026-1, 1 vol (XV-490 p.), isbn 2-84813-026-1Conference Proceedings

Ambient vibration study of the Gi-Lu cable-stay bridge : Application of wireless sensing unitsLU, Kung-Chun; YANG WANG; LYNCH, J. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61741D.1-61741D.11, issn 0277-786X, isbn 0-8194-6227-6Conference Paper

Analytical and experimental characterization of an optical MEMS devicePRYPUTNIEWICZ, Ryszard J; FURLONG, Cosme; PRYPUTNIEWICZ, Emily J et al.SPIE proceedings series. 2003, pp 774-779, isbn 0-8194-5189-4, 6 p.Conference Paper

Mems across the valley of deathBROWN, Alan S.Mechanical engineering (New York, N.Y. 1919). 2006, Vol 128, Num 4, pp 26-30, issn 0025-6501, 5 p.Article

MEMS / MOEMS components and their applications II (San Jose CA, 24-25 January 2005)Henning, Albert K.SPIE proceedings series. 2005, isbn 0-8194-5691-8, XLI, 242 p, isbn 0-8194-5691-8Conference Proceedings

A DC-to-32GHz 2-bit MEMS phase shifterJIANZHONG LOU; ZHENGPING ZHAO; YANG, Ruixia et al.IEEE antennas and propagation society international symposiumNational radio science meeting. 2004, pp 2867-2870, isbn 0-7803-8302-8, 4Vol, 4 p.Conference Paper

Matrix combination of mems relaysFABIAN, J. H; NIAVESH, K; KOTILAINEN, S et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 861-864, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Fabrication and performance testing of a steady thermocapillary pump with no moving partsDEBAR, Michael J; LIEPMANN, Dorian.Proceedings, IEEE micro electro mechanical systems. 2002, pp 109-112, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

A multi-channel micro valve for micro pneumatic artificial muscleYONG KWUN LEE; SHIMOYAMA, Isao.Proceedings, IEEE micro electro mechanical systems. 2002, pp 702-705, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper