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Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditionsSCHENK, Christoph; BUSCHMANN, Stefan; RISSE, Stefan et al.Precision engineering. 2008, Vol 32, Num 4, pp 319-328, issn 0141-6359, 10 p.Article

All inkjet-printed piezoelectric polymer actuators: Characterization and applications for micropumps in lab-on-a-chip systemsPABST, Oliver; PERELAER, Jolke; BECKERT, Erik et al.Organic electronics (Print). 2013, Vol 14, Num 12, pp 3423-3429, issn 1566-1199, 7 p.Article

Contact-free exhaust system for vacuum compatible gas bearing guidesHEIDLER, Nils; SCHENK, Christoph; HARNISCH, Gerd et al.Precision engineering. 2012, Vol 36, Num 1, pp 37-43, issn 0141-6359, 7 p.Article

High-power tandem pumped fiber amplifier with an output power of 2.9 kWWIRTH, Christian; SCHMIDT, Oliver; KLINER, Andrea et al.Optics letters. 2011, Vol 36, Num 16, pp 3061-3063, issn 0146-9592, 3 p.Article

Hybrid micro-optical system integration by laserbeam solderingBECKERT, Erik; EBERHARDT, Ramona; BANSE, Henrik et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 645904.1-645904.8, issn 0277-786X, isbn 978-0-8194-6572-6, 1VolConference Paper

New Packaging Concepts for highly stable Laser Diode ModulesWEMER, Ekkehard; KRETZSCHMAR, Sabine; BONATI, Guido et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7202, issn 0277-786X, isbn 978-0-8194-7448-3, 720204.1-720204.10Conference Paper

Parametric investigation of solder bumping for assembly of optical componentsBURKHARDT, Thomas; HORNAFF, Marcel; BECKERT, Erik et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7202, issn 0277-786X, isbn 978-0-8194-7448-3, 720203.1-720203.10Conference Paper

Inkjet printed micropump actuator based on piezoelectric polymers: Device performance and morphology studiesPABST, Oliver; HÖLZER, Stefan; BECKERT, Erik et al.Organic electronics (Print). 2014, Vol 15, Num 11, pp 3306-3315, issn 1566-1199, 10 p.Article

Precision assembly of a miniaturized wire deflector for electron-beam lithographyRISSE, Stefan; DAMM, Christoph; DÖRING, Hans-Joachim et al.Microelectronic engineering. 2012, Vol 97, pp 100-104, issn 0167-9317, 5 p.Article

Demonstrators : a vital step forward for projection mask-less lithography (PML2)BRANDSTAETTER, Christoph; HAUGENEDER, Ernst; REIMER, Klaus et al.SPIE proceedings series. 2005, pp 188-195, isbn 0-8194-5830-9, 8 p.Conference Paper

Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologiesSCHEIDING, Sebastian; YI, Allen Y; GEBHARDT, Andreas et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7927, issn 0277-786X, isbn 978-0-8194-8464-2, 79270N.1-79270N.11Conference Paper

High-Power Linear-Polarized Narrow Linewidth Photonic Crystal Fiber AmplifierWIRTH, Christian; SCHREIBER, Thomas; REKAS, Miroslaw et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7580, issn 0277-786X, isbn 978-0-8194-7976-1 0-8194-7976-4, 1Vol, 75801H.1-75801H.6Conference Paper

Waveguide Image-Slicers for ultrahigh resolution spectroscopyBECKERT, Erik; STRASSMEIER, Klaus G; WOCHE, Manfred et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7018, pp 70182J.1-70182J.8, issn 0277-786X, isbn 978-0-8194-7228-1 0-8194-7228-X, 3Conference Paper

Data handling and representation of freeform surfacesSTEINKOPF, Ralf; DICK, Lars; KOPF, Tino et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8169, issn 0277-786X, isbn 978-0-8194-8795-7, 81690X.1-81690X.9Conference Paper

Novel construction of a deformable mirror for laser beam shapingBRUCHMANN, Claudia; EBERHARDT, Ramona; BECKERT, Erik et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7209, issn 0277-786X, isbn 978-0-8194-7455-1, 72090B.1-72090B.11Conference Paper

Breaking stress of glass welded with femtosecond laser pulses at high repetition ratesRICHTER, Sören; DÖRING, Sven; PESCHEL, Thomas et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7925, issn 0277-786X, isbn 978-0-8194-8462-8, 79250P.1-79250P.8Conference Paper

Submicron accuracy optimization for laser beam soldering processesBECKERT, Erik; BURKHARDT, Thomas; HORNAFF, Marcel et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7585, issn 0277-786X, isbn 978-0-8194-7981-5 0-8194-7981-0, 1Vol, 758505.1-758505.11Conference Paper

Optoelectronic Packaging based on Laser JoiningEBERHARDT, Ramona; BECKERT, Erik; BURKHARDT, Thomas et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 68800G.1-68800G.10, issn 0277-786X, isbn 978-0-8194-7055-3Conference Paper

Handling of microoptical components for microassemblyBECKERT, Erik; MOHAUPT, Matthias; HARNISCH, Gerd et al.SPIE proceedings series. 2002, pp 531-543, isbn 0-8194-4518-5Conference Paper

High average power spectral beam combining of four fiber amplifiers to 8.2 kWWIRTH, Christian; SCHMIDT, Oliver; JUNG, Markus et al.Optics letters. 2011, Vol 36, Num 16, pp 3118-3120, issn 0146-9592, 3 p.Article

Monolithic all-glass device combining pump coupling and end cap scheme for high-power fiber lasersJUN KI KIM; HAGEMANN, Christian; SCHREIBER, Thomas et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7580, issn 0277-786X, isbn 978-0-8194-7976-1 0-8194-7976-4, 1Vol, 75802F.1-75802F.8Conference Paper

New results of unimorph laser mirrors with screen printed actuatorBRUCHMANN, C; BURKHARDT, T; KAMM, A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7595, issn 0277-786X, isbn 978-0-8194-7991-4 0-8194-7991-8, 1Vol, 75950J.1-75950J.8Conference Paper

Mounting an EUV Schwarzschild microscope lensPESCHEL, Thomas; BANSE, Henrik; DAMM, Christoph et al.Proceedings of SPIE, the International Society for Society Engineering. 2005, pp 59621H.1-59621H.8, issn 0277-786X, isbn 0-8194-5980-1, 2VolConference Paper

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