Fusion-bonded fluidic interconnectsFAZAL, I; ELWENSPOEK, M. C.Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 5, issn 0960-1317, 055011.1-055011.7Article

Parallel-beams/lever electrothermal out-of-plane actuatorDELADI, S; KRIJNEN, G; ELWENSPOEK, M. C et al.Microsystem technologies. 2004, Vol 10, Num 5, pp 393-399, issn 0946-7076, 7 p.Article

Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based electrothermal actuatorsDELADI, S; KRIJNEN, G. J. M; ELWENSPOEK, M. C et al.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 9, pp S31-S36, issn 0960-1317Conference Paper

Innovative process development for a new micro-tribosensor using surface micromachiningDELADI, S; DE BOER, M. J; KRIJNEN, G et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 4, pp S17-S22, issn 0960-1317Conference Paper

A light detection cell to be used in a micro analysis system for ammoniaTIGGELAAR, R. M; VEENSTRA, T. T; SANDERS, R. G. P et al.Talanta (Oxford). 2002, Vol 56, Num 2, pp 331-339, issn 0039-9140Article

Characterization method for a new diffusion mixer applicable in micro flow injection analysis systemsVEENSTRA, T. T; LAMMERINK, T. S. J; ELWENSPOEK, M. C et al.Journal of micromechanics and microengineering (Print). 1999, Vol 9, Num 2, pp 199-202, issn 0960-1317Conference Paper

Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single moleculesHOANG, H. T; TONG, H. D; SEGERS-NOLTEN, I. M et al.Journal of colloid and interface science. 2012, Vol 367, pp 455-459, issn 0021-9797, 5 p.Article

Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin filmsNAZEER, H; NGUYEN, M. D; WOLDERING, L. A et al.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 7, issn 0960-1317, 074008.1-074008.7Conference Paper

Incorporation of in-plane interconnects to reflow bonding for electrical functionalityMOGULKOC, B; JANSEN, H. V; TER BRAKE, H. J. M et al.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 7, issn 0960-1317, 074002.1-074002.7Conference Paper

Black silicon method X : a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipmentJANSEN, H. V; DE BOER, M. J; UNNIKRISHNAN, S et al.Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 3, issn 0960-1317, 033001.1-033001.41Article

Flash release: an alternative for releasing complex MEMS devicesDELADI, S; SVETOVOY, V; KRIJNEN, G. J. M et al.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 12, pp 1659-1664, issn 0960-1317, 6 p.Article

Microfabricated palladium-silver alloy membranes and their application in hydrogen separationTONG, H. D; GIELENS, F. C; GARDENIERS, J. G. E et al.Industrial & engineering chemistry research. 2004, Vol 43, Num 15, pp 4182-4187, issn 0888-5885, 6 p.Article

Experimental investigation of anisotropy in isotropic silicon etchingSVETOVOY, V. B; BERENSCHOT, J. W; ELWENSPOEK, M. C et al.Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 11, pp 2344-2351, issn 0960-1317, 8 p.Article

Influence of silicon orientation and cantilever undercut on the determination of the Young's modulus of thin filmsNAZEER, H; WOLDERING, L. A; ABELMANN, L et al.Microelectronic engineering. 2011, Vol 88, Num 8, pp 2345-2348, issn 0167-9317, 4 p.Conference Paper

Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distanceNAWAZUDDIN, M. B. S; LAMMERINK, T. S. J; WIEGERINK, R. J et al.Journal of micromechanics and microengineering (Print). 2010, Vol 20, Num 6, issn 0960-1317, 064005.1-064005.6Conference Paper

Pressure drop of laminar gas flows in a microchannel containing various pillar matricesVANAPALLI, S; TER BRAKE, H. J. M; JANSEN, H. V et al.Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 7, pp 1381-1386, issn 0960-1317, 6 p.Article

An AFM-based device for in-situ characterization of nano-wearDELADI, S; BERENSCHOT, J. W; DE BOER, M. J et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 181-184, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Fabrication of functional structures on thin silicon nitride membranesEKKELS, P; TJERKSTRA, R. W; KRIJNEN, G. J et al.Microelectronic engineering. 2003, Vol 67-68, pp 422-429, issn 0167-9317, 8 p.Conference Paper

Designing, simulation and realization of in-plane operating micro valves, using new etching techniquesOOSTERBROEK, R. E; BERENSCHOT, J. W; SCHLAUTMANN, S et al.Journal of micromechanics and microengineering (Print). 1999, Vol 9, Num 2, pp 194-198, issn 0960-1317Conference Paper

First micromachined Silicon load cell for loads up to 1000 kgWENSINK, H; DE BOER, M. J; WIEGERINK, R. J et al.SPIE proceedings series. 1998, pp 424-430, isbn 0-8194-2973-2Conference Paper

Thermal-wave balancing flow sensor with low-drift power feedbackDIJKSTRA, M; LAMMERINK, T. S. J; PJETRI, O et al.Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 5, issn 0960-1317, 055016.1-055016.7Article

Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran^®) tubes to silicon substratesMOGULKOC, B; JANSEN, H. V; BERENSCHOT, J. W et al.Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 8, issn 0960-1317, 085027.1-085027.10Article

Nozzle fabrication for micropropulsion of a microsatelliteLOUWERSE, M. C; JANSEN, H. V; GROENENDIJK, M. N. W et al.Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 4, issn 0960-1317, 045008.1-045008.9Article

Fiber-top micromachined devicesIANNUZZI, D; DE MAN, S; ALBERTS, C. J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, issn 0277-786X, isbn 978-0-8194-7204-5, Vol1, 700403.1-700403.4Conference Paper

Seedless electroplating on patterned siliconVARGAS LLONA, L. D; JANSEN, H. V; ELWENSPOEK, M. C et al.Journal of micromechanics and microengineering (Print). 2006, Vol 16, Num 6, issn 0960-1317, S1-S6Conference Paper