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Modeling EUVL Illumination SystemsSMITH, Daniel G.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7103, issn 0277-786X, isbn 978-0-8194-7333-2 0-8194-7333-2, 1Vol, 71030B.1-71030B.8Conference Paper

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Applications of short wavelength radiation : Soft X-ray microscopy and EUV lithographyATTWOOD, D. T.Journal de physique. IV. 2001, Vol 82, pp Pr2.441-Pr2.449, issn 1155-4339Conference Paper

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