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Spin coating: one-dimensional modelBORNSIDE, D. E; MACOSKO, C. W; SCRIVEN, L. E et al.Journal of applied physics. 1989, Vol 66, Num 11, pp 5185-5193, issn 0021-8979, 9 p.Article

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Reactively sputtered WSiN film suppresses As and Ga outdiffusionASAI, K; SUGAHARA, H; MATSUOKA, Y et al.Journal of vacuum science and technology. B. Microelectronics processing and phenomena. 1988, Vol 6, Num 5, pp 1526-1529, issn 0734-211XArticle

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