Microsystèmes pour l'instrumentation optique sur puce : MOEMS = Microsystems for optical instrumentation on chipGORECKI, Christophe.Photoniques (Orsay). 2006, Num 26, pp 40-46, issn 1629-4475, 7 p.Article

Microsystems engineering : metrology and inspection III (Munich, 23-25 June 2003)Gorecki, Christophe.SPIE proceedings series. 2003, isbn 0-8194-5015-4, IX, 210 p, isbn 0-8194-5015-4Conference Proceedings

Classification par échantillonnage de la densité spectrale d'énergie : application à l'étude statistique des surfaces et à l'analyse de particulesGorecki, Christophe; Tribillon, Gilbert.1989, 154 p.Thesis

A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavityGORECKI, Christophe; HEINIS, Dominique.SPIE proceedings series. 2004, pp 183-187, isbn 0-8194-5380-3, 5 p.Conference Paper

Interferometry XV (Applications : 2 and 4-5 August 2010, San Diego, California, United States)Furlong, Cosme; Gorecki, Christophe; Novak, Erik Lowell et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7791, issn 0277-786X, isbn 0-8194-8287-0 978-0-8194-8287-7, various pagings, isbn 0-8194-8287-0 978-0-8194-8287-7Conference Proceedings

Interferometry XIV (applications)Novak, Erik Lowell; Osten, Wolfgang; Gorecki, Christophe et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7064, issn 0277-786X, isbn 978-0-8194-7284-7 0-8194-7284-0, 1Vol, various pagings, isbn 978-0-8194-7284-7 0-8194-7284-0Conference Proceedings

Reliability study of AIN-driven microcantilevers based on interferometric measurements of their static and dynamic behavioursGORECKI, Christophe; KRUPA, Katarzyna; JOZWICKI, Romuald et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7791, issn 0277-786X, isbn 0-8194-8287-0 978-0-8194-8287-7, 779104.1-779104.11Conference Paper

Integrated optics and MEMS in microsensingGORECKI, Christophe.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 59560E.1-59560E.5, issn 0277-786X, isbn 0-8194-5963-1, 1VolConference Paper

Makyoh topography: a simple yet powerful optical method for flatness and defect characterisation of mirror-like surfacesRIESZ, Ferenc.SPIE proceedings series. 2004, pp 86-100, isbn 0-8194-5380-3, 15 p.Conference Paper

Three-dimensional dynamic environmental MEMS characterizationNOVAK, Erik.SPIE proceedings series. 2004, pp 1-8, isbn 0-8194-5380-3, 8 p.Conference Paper

Interferometry XIII (Applications : 16-17 August, 2006, San Diego, California, USA)Novak, Erik L; Osten, Wolfgang; Gorecki, Christophe et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6372-8, pagination multiple, isbn 0-8194-6372-8Conference Proceedings

Deep Wet-Etched Silicon Cavities for Micro-Optical Sensors: Influence of Masking on {111} Sidewalls Surface QualityCHUTANI, Ravinder; PASSILLY, Nicolas; ALBERO, Jorge et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 585-591, issn 1057-7157, 7 p.Article

Evaluation of micromechanical properties of buckled Si_OxN_y-loaded membranes by combining the Twyman-Green interferometry with nanoindentation and point-wise deflection techniqueJOZWIK, Michal; GORECKI, Christophe; SABAC, Andrei et al.Optics and lasers in engineering. 2004, Vol 41, Num 5, pp 703-716, issn 0143-8166, 14 p.Article

Vibration insensitive 3D-profilometry : A new type of white light interferometric microscopyCOHEN-SABBAN, J; REOLON, D.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7064, pp 706405.1-706405.9, issn 0277-786X, isbn 978-0-8194-7284-7 0-8194-7284-0, 1VolConference Paper

Error Minimization in high-accuracy scanning deflectometryGECKELER, Ralf D.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 62930O.1-62930O.12, issn 0277-786X, isbn 0-8194-6372-8Conference Paper

Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometerLEHMANN, Peter.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 618811.1-618811.11, issn 0277-786X, isbn 0-8194-6244-6, 1VolConference Paper

Analysis of static and dynamic operational behaviour of active micromembranesASWENDT, Petra; DEAN, Thierry.SPIE proceedings series. 2004, pp 25-33, isbn 0-8194-5380-3, 9 p.Conference Paper

Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrationsSERIO, B; HUNSINGER, J. J; CRETIN, B et al.SPIE proceedings series. 2004, pp 257-264, isbn 0-8194-5380-3, 8 p.Conference Paper

Accurately measuring a surface by using a computer-generated hologramHUA LIU; ZHENWU LU; HONXIN ZHANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7064, pp 70640P.1-70640P.8, issn 0277-786X, isbn 978-0-8194-7284-7 0-8194-7284-0, 1VolConference Paper

Phase-shift Fizeau interferometer in presence of vibrationDOLOCA, Radu; BROISTEDT, Hagen; TUTSCH, Rainer et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7064, pp 706403.1-706403.12, issn 0277-786X, isbn 978-0-8194-7284-7 0-8194-7284-0, 1VolConference Paper

Holographic interferometry deformations metrology by using AR modellingMOKDAD, Rabah; EL-HAFIDI, Idriss; MEYRUEIS, Patrick et al.SPIE proceedings series. 2004, pp 136-140, isbn 0-8194-5380-3, 5 p.Conference Paper

Evolutionary approach to an inverse problem in near-field optics microscopyBARCHIESI, Demetrio Macias; VIAL, Alexandre.SPIE proceedings series. 2004, pp 188-195, isbn 0-8194-5380-3, 8 p.Conference Paper

Range imaging for measuring streambed topographyKOHOUTEK, Tobias K; NITSCHE, Manuel.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7791, issn 0277-786X, isbn 0-8194-8287-0 978-0-8194-8287-7, 77910F.1-7791F0.6Conference Paper

Phase error correction in wavefront curvature sensing via phase retrievalALMORO, Percival F; HANSON, Steen G.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7064, pp 70640F.1-70640F.11, issn 0277-786X, isbn 978-0-8194-7284-7 0-8194-7284-0, 1VolConference Paper

Modified linear and circular carrier frequency Fourier transform method applied for studies of vibrating microelementsKACPERSKI, Jacek; KUJAWINSKA, Malgorzata; KREZEL, Jerzy et al.SPIE proceedings series. 2004, pp 287-298, isbn 0-8194-5380-3, 12 p.Conference Paper