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Results 1 to 25 of 607

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New design of micromachined capacitive force sensorDESPONT, M; RACINE, G. A; RENAUD, P et al.Journal of micromechanics and microengineering (Print). 1993, Vol 3, Num 4, pp 239-242, issn 0960-1317Conference Paper

A simulation tool for orientation dependent etchingFRÜHAUF, J; TRAUTMANN, K; WITTIG, J et al.Journal of micromechanics and microengineering (Print). 1993, Vol 3, Num 3, pp 113-115, issn 0960-1317Conference Paper

Analysis of buried etch-stop layers in silicon by nitrogen-ion implantationACERO, M. C; PEREZ-RODRIGUEZ, A; ESTEVE, J et al.Journal of micromechanics and microengineering (Print). 1993, Vol 3, Num 3, pp 143-145, issn 0960-1317Conference Paper

An etch-stop utilizing selective etching of N-type silicon by pulsed potential anodizationWANG, S. S; MCNEIL, V. M; SCHMIDT, M. A et al.Journal of microelectromechanical systems. 1992, Vol 1, Num 4, pp 187-192, issn 1057-7157Article

Characteristics of gas-assisted focused ion beam etchingYOUNG, R. J; CLEAVER, J. R. A; AHMED, H et al.Journal of vacuum science & technology. B. Microelectronics and nanometer structures. Processing, measurement and phenomena. 1993, Vol 11, Num 2, pp 234-241, issn 1071-1023Conference Paper

Slope etching of silicon dioxideKAL, S; HALDAR, S; LAHIRI, S. K et al.Microelectronics and reliability. 1990, Vol 30, Num 4, pp 719-722, issn 0026-2714Article

Selective etching of SiGe on SiGe/Si heterostructuresCHANG, G. K; CARNS, T. K; RHEE, S. S et al.Journal of the Electrochemical Society. 1991, Vol 138, Num 1, pp 202-204, issn 0013-4651Article

Selective etch-back and growth of InGaAs ON (100) Fe:InP by electroepitaxyALI ABUL-FADL; COLLIS, W; SAMIR MAANAKI et al.Journal of electronic materials. 1990, Vol 19, Num 1, pp 111-116, issn 0361-5235, 6 p.Article

Selective photoetching of n-GaAs/ZnSe heterostructuresVAN DE VEN, J.Materials letters (General ed.). 1989, Vol 7, Num 12, pp 468-472, issn 0167-577XArticle

Mechanism of selective Si3N4 etching over SiO2 in hydrogen-containing fluorocarbon plasmaLELE CHEN; LINDA XU; DONGXIA LI et al.Microelectronic engineering. 2009, Vol 86, Num 11, pp 2354-2357, issn 0167-9317, 4 p.Article

Pulse-time-modulated ECR plasma discharge for highly selective, highly anisotropic and charge-free etchingSAMUKAWA, S; OHTAKE, H; MIENO, T et al.NEC research & development. 1996, Vol 37, Num 2, pp 179-190, issn 0547-051XArticle

Silicon trench etching in a multi-frequency discharge reactorHASCIK, S; HORNIAKOVA, A; HURAN, J et al.Vacuum. 1994, Vol 45, Num 8, pp 915-917, issn 0042-207XArticle

Fabrication of nanometer-scale conducting silicon wires with a scanning tunneling microscopeCAMPBELL, P. M; SNOW, E. S; MCMARR, P. J et al.Solid-state electronics. 1994, Vol 37, Num 4-6, pp 583-586, issn 0038-1101Conference Paper

Extremely high selective, highly anisotropic, and high rate electron cyclotron resonance plasma etching for n+ poly-Si at the electron cyclotron resonance positionSAMUKAWA, S; SASAKI, M; SUZUKI, Y et al.Journal of vacuum science and technology. B. Microelectronics processing and phenomena. 1990, Vol 8, Num 6, pp 1192-1198, issn 0734-211XArticle

Selective chemically assisted ion beam etching of Si, polysilicon, and SiO2 using Ni-Cr masks and Cl2ZHAOHUA XIAO; NILSSON, B; SVEDBERG, P et al.Journal of the Electrochemical Society. 1990, Vol 137, Num 5, pp 1579-1581, issn 0013-4651Article

UV patterning of vanadium pentoxide films for device applicationsPUTROLAYNEN, V. V; VELICHKO, A. A; PERGAMENT, A. L et al.Journal of physics. D, Applied physics (Print). 2007, Vol 40, Num 17, pp 5283-5286, issn 0022-3727, 4 p.Article

Distributed optical feedback and nonlinear photonic crystals based on selective etching of periodically-poled lithium niobateCAPMANY, Juan; FERNANDEZ-POUSA, Carlos R.Lasers and Electro-optics Society. 2004, isbn 0-7803-8557-8, 2Vol, Vol2, 877-878Conference Paper

Controlled purification of single-walled carbon nanotube films by use of selective oxidation and near-IR spectroscopyRAHUL SEN; RICKARD, Shawna M; ITKIS, Mikhail E et al.Chemistry of materials. 2003, Vol 15, Num 22, pp 4273-4279, issn 0897-4756, 7 p.Article

Transfer of monocrystalline Si films for silicon-on-insulator devicesSATO, Nobuhiko; OHMI, Kazuaki; YONEHARA, Takao et al.Growth, characterization and electronic applications of Si-based thin films. 2002, pp 197-216, isbn 81-7736-108-2, 20 p.Book Chapter

Selective etching in laser written semiconductor-doped glassesSMUK, A. Y; LAWANDY, N. M.Optics communications. 1998, Vol 156, Num 4-6, pp 297-299, issn 0030-4018Article

A selective etching solution for use with patterned self-assembled monolayers of alkanethiolates on goldYOUNAN XIA; XIAO-MEI ZHAO; ENOCH KIM et al.Chemistry of materials. 1995, Vol 7, Num 12, pp 2332-2337, issn 0897-4756Article

Dopant selective photoelectrochemical etching of GaAs homostructuresKHARE, R; HU, E. L.Journal of the Electrochemical Society. 1991, Vol 138, Num 5, pp 1516-1519, issn 0013-4651Article

Small dimension Bragg reflectors formed by air-isolated GaAs layersBEYLER, C. A; HUMMEL, S. G; FRATESCHI, N et al.Electronics Letters. 1991, Vol 27, Num 7, pp 588-590, issn 0013-5194, 3 p.Article

Dry etching characteristics of LiNbO3CHUNG, P. S; HORWITZ, C. M; GUO, W. L et al.Electronics Letters. 1986, Vol 22, Num 9, pp 484-485, issn 0013-5194Article

Improved graphene growth in UHV: Pit-free surfaces by selective Si etching of SiC(0001)―Si with atomic hydrogenSANDIN, Andreas; ROWE, J. E. (jack); DOUGHERTY, Daniel B et al.Surface science. 2013, Vol 611, pp 25-31, issn 0039-6028, 7 p.Article

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