au.\*:("HAN CHANG SHIH")
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Exploring the effect of neon on the CVD diamond film from methane-hydrogen plasma dischargeCHIA-PIN SUNG; HAN-CHANG SHIH.Materials chemistry and physics. 1992, Vol 32, Num 3, pp 255-262, issn 0254-0584Article
A chemical kinetics model for a mixed-abrasive chemical mechanical polishingPING HSUN CHEN; BING WEI HUANG; HAN CHANG SHIH et al.Thin solid films. 2005, Vol 483, Num 1-2, pp 239-244, issn 0040-6090, 6 p.Article
Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenchesPING HSUN CHEN; YAU, Colin; KUANG YUNG WU et al.Microelectronic engineering. 2005, Vol 77, Num 2, pp 110-115, issn 0167-9317, 6 p.Article
Formation and characterization of DLC:Cr:Cu multi-layers coating using cathodic arc evaporationJUI YUN JAO; SHENG HAN; LI SHEN CHANG et al.Diamond and related materials. 2009, Vol 18, Num 2-3, pp 368-373, issn 0925-9635, 6 p.Conference Paper