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Photomask and next-generation lithography mask technology XV (16-18 April 2008, Yokohama, Japan)Horiuchi, Toshiyuki.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2 v, 2, isbn 978-0-8194-7243-4 0-8194-7243-3Conference Proceedings

Optimization of MDP, mask writing, and mask inspection for mask manufacturing cost reductionYAMABE, Masaki.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70280V.1-70280V.8, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Logic Device Scaling Trend in ITRS 2007IMAI, Kiyotaka.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, PART I, 702802.1-702802.8, 2Conference Paper

A modified dynamical model of drying process of polymer blend solution coated on a flat substrateKAGAMI, Hiroyuki.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 702825.1-702825.9, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Matrix projection exposure using an analogue liquid crystal display panel in place of a reticleHORIUCHI, Toshiyuki; OTANI, Ayaka.Optical review. 2007, Vol 14, Num 4, pp 224-230, issn 1340-6000, 7 p.Conference Paper

Fabrication of precise copper micro-coils using electrolytic etchingHORIUCHI, Toshiyuki; ISHII, Hidetoshi.Microelectronic engineering. 2012, Vol 97, pp 212-215, issn 0167-9317, 4 p.Article

Micro-fabrication of air-bearing grooves onto inner surfaces of fine copper pipes : Nanofabrication 2012HORIUCHI, Toshiyuki; SUZUKI, Yuya.Microelectronic engineering. 2013, Vol 110, pp 422-426, issn 0167-9317, 5 p.Conference Paper

Fabrication of nickel micro-parts using liquid―crystal-display projection lithography and newly developed pattern transfer processHORIUCHI, Toshiyuki; SHIRATORI, Sho.Microelectronic engineering. 2012, Vol 98, pp 574-577, issn 0167-9317, 4 p.Conference Paper

Relationship between urinary phytoestrogen levels and Z score of lumbar vertebral bone mineral density in Japanese postmenopausal womenHORIUCHI, Toshiyuki; ONOUCHI, Tsuneko.Nutrition research (New York, NY). 2006, Vol 26, Num 8, pp 409-412, issn 0271-5317, 4 p.Article

Case Study : The Impact of VSB FracturingDILLON, Brian; NORRIS, Tim.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70280F.1-70280F.9, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Finite Element Simulation of Light Propagation in Non-Periodic Mask PatternsZSCHIEDRICH, Lin; SCHMIDT, Frank.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 702831.1-702831.9, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

What You See is What You Print : Aerial Imaging as an Optimal Discriminator Between Printing and Non-Printing Photomask DefectsSAGIV, Amir; MANEAN, Shmoolik.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70281E.1-70281E.12, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Describing Litho-Constrained Layout by a High-Resolution Model FilterTSAI, Min-Chun.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70280S.1-70280S.8, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Hybrid Resist Model to Enhance Continuous Process Window Model for OPCQIAOLIN ZHANG; LUCAS, Kevin.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70280L.1-70280L.10, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Phase shift mask etch process development utilizing a scatterometry-based metrology toolPLUMHOFF, Jason; GRAY, Alexander.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 702807.1-702807.9, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Projection lithography onto small-diameter copper shafts and fabrication of a micro-axial pumpHORIUCHI, Toshiyuki; HAYASHI, Naoki.Microelectronic engineering. 2009, Vol 86, Num 4-6, pp 1176-1178, issn 0167-9317, 3 p.Conference Paper

Fabrication of micro-coils using laser scan lithography on copper pipesKANEKO, Yoshihisa; HASHIMOTO, Kohei; HORIUCHI, Toshiyuki et al.Microelectronic engineering. 2006, Vol 83, Num 4-9, pp 1249-1252, issn 0167-9317, 4 p.Conference Paper

Improved projection-matrix-exposure using a liquid crystal display panel for printing smooth arbitrary patterns without reticlesHORIUCHI, Toshiyuki; KOBAYASHI, Hiroshi.Microelectronic engineering. 2004, Vol 73-74, pp 48-52, issn 0167-9317, 5 p.Conference Paper

Pelvic insufficiency fracture associated with severe suppression of bone turnover by alendronate therapyIMAI, Kazuhiro; YAMAMOTO, Seizo; ANAMIZU, Yorito et al.Journal of bone and mineral metabolism (English ed.). 2007, Vol 25, Num 5, pp 333-336, issn 0914-8779, 4 p.Article

Projection lithography onto overall cylindrical surfacesHASHIMOTO, Kohei; KANEKO, Yoshihisa; HORIUCHI, Toshiyuki et al.Microelectronic engineering. 2006, Vol 83, Num 4-9, pp 1312-1315, issn 0167-9317, 4 p.Conference Paper

Comparison of Triple Patterning Decomposition Algorithms Using Aperiodic Tiling PatternsCORK, Chris; MADRE, Jean-Christophe; BARNES, Levi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 702839.1-702839.7, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Mask Transmission Resonance in bi-layer masksPHILIPSEN, Vicky; DE BISSCHOP, Peter; MESUDA, Kei et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 702815.1-702815.8, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

OPC model enhancement using parameter sensitivity methodologyWARD, Brian S; DRAPEAU, Martin.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70280N.1-70280N.11, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Results of New Mask Contamination Inspection Capability STARJight2+ 72nm pixel for Qualifying Memory Masks in Wafer FabsDOVER, Russell; JINGGANG ZHU; SCHMIDT, Norbert et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70282N.1-70282N.6, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Influence of mask surface processing on CD-SEM imagingHAUPTMANN, Marc; ENG, Lukas M; RICHTER, Jan et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 702830.1-702830.8, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

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