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ETUDE DES DEFAUTS DE STRUCTURE INTRODUITS PAR LES PROCESSUS D'ELABORATION DES DISPOSITIFS A SEMICONDUCTEURS. CORRELATION AVEC LES PERFORMANCESLAFEUILLE D; JULEFF EM; PECCOUD L et al.1972; DGRST-71 7 2617; FR.; DA. 1972; PP. (42 P.); H.T. 47; BIBL. 2 P. 1/2; (RAPP. FINAL, ACTION CONCERTEE: COM. CIRCUITS ET COMPOSANTS MICROMINIATURISES). 2 FASCReport