Design of microelectrode arrays for electrostatic microactuators and capacitive microsensorsPEIZEN CHANG; CHIENLIU CHANG; KAIHSIANG YEN et al.Journal of intelligent material systems and structures. 1998, Vol 9, Num 2, pp 95-103, issn 1045-389XArticle

Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS processDAI, Ching-Liang; KAIHSIANG YEN; CHANG, Pei-Zen et al.Journal of micromechanics and microengineering (Print). 2001, Vol 11, Num 6, pp 697-702, issn 0960-1317Article

Design and experiment of microelectrode arrays for deformable membrane mirrorCHIENLIU CHANG; PEIZEN CHANG; KAIHSIANG YEN et al.SPIE proceedings series. 1998, pp 95-105, isbn 0-8194-2972-4Conference Paper

Fabrication of micromachined microwave couplers by CMOS processCHIENLIU CHANG; JINHONG CHIO; KAIHSIANG YEN et al.SPIE proceedings series. 1998, pp 393-402, isbn 0-8194-2973-2Conference Paper

Wideband microwave switch by micromachining techniquesCHIENLIU CHANG; PEIZEN CHANG; KAIHSIANG YEN et al.SPIE proceedings series. 1998, pp 229-236, isbn 0-8194-2973-2Conference Paper

Integrated eyeball-tracking deviceHUNGLIN CHEN; KAIHSIANG YEN; JINHUNG CHIO et al.SPIE proceedings series. 2000, pp 637-645, isbn 0-8194-3717-4Conference Paper

Fabrication of diffractive optical elements using the CMOS processHUNGLIN CHEN; HUIWEN HUANG; KAIHSIANG YEN et al.SPIE proceedings series. 2000, pp 627-636, isbn 0-8194-3717-4Conference Paper

Applied electrostatic parallelogram actuators for microwave switches by standard CMOS processKAIHSIANG YEN; CHIELIU CHANG; PEIZEN CHANG et al.SPIE proceedings series. 1999, pp 1022-1029, isbn 0-8194-3154-0, 2VolConference Paper